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Preparation method of metaboric acid metal salt laser sputtering target material

A technology of laser sputtering and metaboric acid, which is applied in the field of laser sputtering ion source and metaboric acid metal salt laser sputtering target preparation, which can solve the problem of uneven crystallization of metal salt targets, difficulty in obtaining simple metal substances, and short sputtering life and other problems, to achieve the effect of easy access, simple experimental conditions, and uniform texture

Active Publication Date: 2022-07-22
INNOVATION ACAD FOR PRECISION MEASUREMENT SCI & TECH CAS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Elemental metal targets are the best choice for laser sputtering targets, but the elemental metals of some ion samples are difficult to obtain and need to be replaced by metal oxides or metal salts
The preparation of metal oxide targets generally requires a lot of pressure or high temperature, and the process is complicated
The metal salt target prepared by the general method has uneven crystallization, thin thickness and short sputtering life

Method used

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  • Preparation method of metaboric acid metal salt laser sputtering target material
  • Preparation method of metaboric acid metal salt laser sputtering target material
  • Preparation method of metaboric acid metal salt laser sputtering target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0059]Example 1: Weigh 7.5g of borax and 2.5g of thorium dioxide with an electronic balance, the mass fraction of thorium dioxide is 25%, grind and mix them evenly in a mortar, and put them into a ceramic crucible; Heating on the outer flame of the alcohol lamp until the raw materials are completely melted, pour the melt in the ceramic crucible into the alumina ceramic mold evenly, and the melt in the crucible can be poured out smoothly; A metal metaborate metal salt laser sputtering target was obtained.

Embodiment 2

[0060] Example 2: Weigh 5 g of borax and 5 g of thorium dioxide with an electronic balance, the mass fraction of thorium dioxide is 50%, grind and mix in a mortar, and put into a ceramic crucible. Hold the ceramic crucible with crucible tongs and heat it on the outer flame of the alcohol lamp until the raw materials are completely melted. Pour the melt in the ceramic crucible into the alumina ceramic mold evenly. The melt in the crucible is thicker but can still be poured out smoothly. . After complete cooling, the white solid was removed from the mold substrate to obtain a metal metaborate metal salt laser sputtering target.

Embodiment 3

[0061] Example 3: Weigh 2.5g of borax and 7.5g of thorium dioxide with an electronic balance, the mass fraction of thorium dioxide is 75%, grind and mix in a mortar and evenly, and put into a ceramic crucible. The ceramic crucible was clamped with crucible tongs and heated on the outer flame of the alcohol lamp. The raw materials in the ceramic crucible could not be completely melted, and most of them were still powder or granules. The metaborate metal salt laser sputtering target was unsuccessfully obtained.

[0062] 2. Examples of properties testing of metal metaborate metal salt laser sputtering targets

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Abstract

The invention discloses a preparation method of a metaboric acid metal salt laser sputtering target material, and relates to the field of laser sputtering ion sources. The preparation method comprises the following steps: (1) weighing raw materials; (2) grinding and mixing; (3) heating and melting; (4) cooling to prepare a target; (5) property testing: A, hardness testing; b, testing the surface appearance; c, performing laser sputtering test; and D, performing time-of-flight mass spectrometry on the thorium metaborate laser sputtering target. Compared with the existing laser sputtering target material, the laser sputtering target material has the following advantages and positive effects: 1) the preparation principle and process are simple; 2) the raw materials are easy to obtain, and borax and metal oxides such as thorium dioxide are very easy to obtain; and (3) the prepared metaboric acid metal salt laser sputtering target material is hard, flat, uniform in texture, certain in thickness and long in sputtering service life.

Description

technical field [0001] The invention relates to a laser sputtering ion source, in particular to a method for preparing a metaborate metal salt laser sputtering target, which is suitable for the research and application fields of ion generation and trapping. Background technique [0002] In the field of ion generation and trapping research and applications, laser sputtering is a commonly used method for ion generation. The principle of laser sputtering is that the laser interacts with the target to generate plasma, and then the plasma undergoes Coulomb explosion during the flight, producing ions of different numbers and various valence states. These ions are mass-to-charge selected by the ion trap, trapping ions with a specific mass-to-charge ratio. The ions generated by laser sputtering all come from the target material. The preparation of the target material with hard, flat, uniform texture and stable life is the key technology of laser sputtering. [0003] Generally, las...

Claims

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Application Information

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IPC IPC(8): C04B35/50C04B35/01C04B35/622
CPCC04B35/50C04B35/01C04B35/622C04B2235/3409C04B2235/3224
Inventor 童昕李梓王晨彭文翠李林华夏
Owner INNOVATION ACAD FOR PRECISION MEASUREMENT SCI & TECH CAS