Simplified calibration method of pressure sensor

Abstract

The invention discloses a calibration simplification method of a pressure sensor. The method comprises the following steps: 1) placing a pressure sensor in a corresponding temperature environment, applying different pressures to obtain experimental calibration data, and sending the experimental calibration data to an upper computer; 2) performing normalization processing and feature expansion on the calibration data; 3) using a hybrid polynomial kernel extreme learning machine optimized by an improved eagle optimizer to learn calibration data to obtain a calibration calculation model; 4) inputting the values of the uncalibrated temperature points and pressure points into the trained calibration calculation model to obtain model calculation data; and 5) integrating experimental calibration data and model calculation data to form an online compensation data table, sending the online compensation data table to the MCU, and performing online temperature compensation on the pressure sensor by using a linear interpolation method. Through a small amount of calibration data, calculation data of the whole temperature zone can be inferred, temperature and pressure points needing to be calibrated are reduced, calibration work efficiency is improved, energy consumption is reduced, and temperature compensation precision is improved.

Description

technical field [0001] The invention relates to the technical field of sensor measurement, in particular to a simplified method for calibration of a pressure sensor. Background technique [0002] Pressure sensors are one of the most commonly used sensors in process control and automation systems, and silicon piezoresistive pressure sensors manufactured by MEMS technology are widely used in different industries due to their high sensitivity, small size, and low production cost. . In practical applications, the change of the external ambient temperature will cause the output of the pressure sensor to produce temperature drift, which will seriously affect the measurement accuracy of the sensor, so temperature compensation must be performed. [0003] Temperature compensation methods for pressure sensors are mainly divided into two categories: built-in circuit methods and numerical calibration methods. The built-in circuit method usually uses thermistors, diodes or adjustable g...

AI Technical Summary

Problems solved by technology

However, the setting of different temperature environments and pressure environments in the actual calibration process is cumbersome and time-consuming, which seriously affects the calibration efficiency and causes a lot of energy consumption

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