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Wavelength-tunable electric-sucking modulated laser device with distributed feedback and its preparing process

A technology of electroabsorption modulation and manufacturing method, which is applied to lasers, laser components, semiconductor lasers, etc., and can solve problems such as complex structure, low output optical power, and increased manufacturing complexity

Inactive Publication Date: 2004-06-09
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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Problems solved by technology

See IEEE Photon.Tech.Lett., vol.9, pp.563-565, 1997, but the structure is extremely complex, the production cost is high, and the discontinuous tuning range is only about 4nm
2. The monolithic integration of DBR lasers and electroabsorption modulators reported by D.Delprat of France Telecom in IEEE Photon.Tech.Lett., vol.9, pp.898-900, 1997, but the output optical power of this structure Small, needs to integrate a semiconductor optical amplifier, which increases the complexity of production

Method used

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  • Wavelength-tunable electric-sucking modulated laser device with distributed feedback and its preparing process
  • Wavelength-tunable electric-sucking modulated laser device with distributed feedback and its preparing process
  • Wavelength-tunable electric-sucking modulated laser device with distributed feedback and its preparing process

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Embodiment Construction

[0017] The present invention is described in detail below in conjunction with accompanying drawing. The tunable EML we fabricated is not only structurally different from the above two structures, but also the tuning mechanism is different.

[0018] First of all, in order to achieve high-speed modulation, the curved waveguide EML uses iron-doped high-resistance indium phosphide (3 microns thick) to bury the strip structure, which is not only complicated to manufacture, high in cost, but also has an impact on reliability; while France Telecom uses low Dielectric constant polyimide buried ridge waveguide structure, which has poor thermal conductivity;

[0019] Secondly, in order to achieve wavelength tunability and reduce unnecessary transmission loss, the curved waveguide EML needs to accurately design the size and inclination angle of the waveguide, which requires strict manufacturing tolerances, and from the test results, the tuning range is only quasi-continuous The EML of F...

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Abstract

A heater of metallic film is made up on one side of ridge type wave-guide of EML laser to change the operating current of the heater and it can change operating temperature of laser so as to change EML wavelength. In order to change operating current in phase modulation area, at same time, a phase modulator is added to the rear end of DFB laser so as to change the phase of feedback light of DFB laser. Moreover, the working condition of threshold of DFB laser is changed so as to realize EML with wavelength being modulated rapidly.

Description

technical field [0001] The invention relates to a manufacturing method of a novel wavelength tunable electric absorption modulation distributed feedback laser [distributed feedback laser (DFB-LD) and electric absorption modulator (EA modulator) monolithic integrated device]. Background technique [0002] Electroabsorption modulated DFB (distributed feedback) lasers have become the main light source used in long-distance trunk high-speed optical communication systems. Because of the advantages of the device's small size, low cost, low jitter, and low driving voltage, the research and development of this device has been greatly promoted. attention. However, with the development of the internet, in order to solve the bottleneck of network transmission rate, wavelength division multiplexing (WDM) technology needs to be adopted. In the wavelength division multiplexing technology, the International Telecommunication Union (ITU) has made strict requirements on the frequency of the...

Claims

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Application Information

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IPC IPC(8): H01S5/00H01S5/062
Inventor 刘国利王圩张静媛
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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