Method for preparing template with macro nanometer sequential holes

A nano-hole and large-size technology, which is applied in the field of preparation of large-size nano-ordered hole templates, can solve the problems of unobtainable and long nano-holes, and achieve the effects of easy depth, low processing cost and reliable process
CN1155740CInactive Publication Date: 2004-06-30NANJING UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
NANJING UNIV
Publication Date
2004-06-30
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

A preparation method of large-size nanometer ordered orifice template is that a large area ordered pattern is formed on surface of metal aluminium, aluminium alloy or single-crystal aluminium, then the anode oxidation method is used to form large area ordered nanometer orifice template on aluminium or aluminium allog. Single crystal aluminium is used as substrate, and the anode oxidation is directly proceeded. The present invention can produce nanometer orifice template with high-density large area hexagonal symmetrical ordered long orifice and it can also produce ordered nanometer pipe, bar, etc..
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Description

1. Technical field

[0001] The invention relates to a method for preparing nano-ordered holes, in particular to a method for preparing a large-scale nano-ordered hole template. 2. Background technology

[0002] Large-scale nano-ordered hole templates can be very well applied. For example, it is used for new magnetic recording disk substrates, etc. The existing compression molding technology, photolithography and electron beam etching technology can obtain large-area nano-ordered hole templates, but cannot obtain long nano-holes with uniform diameters. The direct anodic oxidation method can only obtain small-area ordered nanohole templates. 3. Contents of the invention

[0003] The object of the present invention is to propose a method for preparing a large-scale nano-ordered hole template, to obtain a large-area nano-ordered hole template, and to obtain long nano-holes with uniform diameters. The object of the present invention is also to provide a preparation method wit...

Claims

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