Method for preparing template with macro nanometer sequential holes
A nano-hole and large-size technology, which is applied in the field of preparation of large-size nano-ordered hole templates, can solve the problems of unobtainable and long nano-holes, and achieve the effects of easy depth, low processing cost and reliable process
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[0007] Below according to accompanying drawing and embodiment the present invention will be further described:
[0008] The embodiment of the method of the present invention: the embodiment of preparing large-scale nano-ordered hole templates on metal aluminum or aluminum alloy is divided into three steps, the first step is to produce hexagonal symmetrical large-area nano-ordered patterns; the second step is to perform electrochemical anode Oxidation, the third step is to adjust the diameter of the hole through the action of the hole-enlarging fluid.
[0009] There are three options for the first step,
[0010] 1. A mother board is made of silicon carbide, single crystal silicon or other materials, and nano-columns with uniform diameters are distributed symmetrically in a hexagonal manner on the board. Cover a layer of polymer material film (such as PMMA) on a flat aluminum (or aluminum alloy) substrate, and use polycool film, etc., to press the mother board on the polymer ma...
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