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Self-adaptive microtype optical fibre connector

An optical fiber connector and self-adaptive technology, applied in the direction of optical waveguide light guide, optical waveguide coupling, etc., can solve the problems of damage, inability to realize integrated manufacturing, difficult to grasp the scale of manual movement of micro device structure, etc., and achieve the effect of small size

Inactive Publication Date: 2005-12-21
SHANGHAI JIAOTONG UNIV
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  • Abstract
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Problems solved by technology

Even if the V-shaped groove is made by silicon etching technology and used in a micro-optical system, an additional cover plate must be added to fix the optical fiber in the V-shaped groove, which cannot take advantage of the high-density molding of the V-shaped groove. The goal of integrated manufacturing cannot be achieved
At the same time, the above-mentioned optical fiber connectors based on the V-groove alignment principle need to manually remove the cover plate to free a certain position during the optical fiber insertion process so that the optical fiber can enter the fixing groove, which is unacceptable for miniature optical fiber connectors. First of all, there is not enough space for operation, and secondly, it is difficult to grasp the scale of manual movement of the micro-device structure, which is easy to cause damage

Method used

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Embodiment

[0024] Using single crystal silicon wafer as the substrate and electrodeposited nickel thin film as the cover material, a typical miniature optical fiber connector was prepared by multi-layer microstructure three-dimensional micromachining technology. The process is as follows:

[0025] Starting from thermally oxidized silicon wafers, first mask photolithography and then chemically etch with buffered hydrofluoric acid to open an etching window for the V-shaped groove 2, and then anisotropically etch with 35% KOH at 70°C for about 3 hours to form V-groove 2. Fill the formed V-groove with photoresist (such as AZ4630, etc.), cure at low temperature, spin-cut and level off, spin-coat a 30-micron thick glue on the surface, go through photolithography, bake the glue at 90°C, and then spin-coat 5 microns The photoresist is then baked again at 95° C. for 100 minutes to form a semi-tapered photoresist structure that causes the two ends of the cover plate 3 to warp. Then photolithograph...

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Abstract

An adaptive miniature optical fiber connector, mainly including a silicon base, a V-shaped groove formed on the silicon base, a curved metal cover plate that spans above the V-shaped groove and is suspended to cover the V-shaped groove, and the two ends of the metal cover plate are warped The widening forms a bell mouth, and the middle part is symmetrically distributed with slit openings. An optical fiber fixing channel along the V-shaped groove is formed between the metal cover plate and the silicon substrate, and the two ends of the fixing channel are semi-conical guiding channels. The invention adopts the principle of V-groove positioning to achieve precise alignment or positioning. The curved metal cover plate provides continuous and stable pressure for fixing the optical fiber. The contact pressing of the optical fiber fixes the optical fiber. The miniature optical fiber connector of the present invention is easy to be integrated and manufactured, and has a small volume, which can realize optical fiber insertion and extraction, precise alignment, positioning and fixing, is convenient for forming a miniaturized optical fiber connector design, and is also suitable for ribbon optical fiber connections with relatively strict space requirements .

Description

technical field [0001] The invention relates to an adaptive miniature optical fiber connector, which is an optical fiber clamping and fixing mechanism capable of realizing reliable fixing and precise positioning of optical fibers and having a self-alignment function, and belongs to the technical field of optical fiber communication. Background technique [0002] Optical fiber communication is the mainstream direction of the development of modern communication technology. Its transmission medium is optical fiber. In this communication system, optical fiber connector is one of the most widely used passive devices. It connects optical fibers or optical cables to each other in a low-loss method. Get up to realize the continuation of the optical path. With the continuous development of optical communication technology and optical fiber optic instruments, the requirements for the fixed connection mechanism of optical fiber are getting higher and higher, especially the demand for r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/12G02B6/36
Inventor 蒋振新丁桂甫姚锦元
Owner SHANGHAI JIAOTONG UNIV