Air filter

Abstract

An air filter device is connected with an external water supply device and an air pipeline to filter suspended particles in the passing gas, which includes: a cavity and a water curtain generator. The cavity has a plurality of nozzles connected to the external water supply device, which continuously sprays water mist into the cavity. The water curtain generator is socketed at the gas outlet of the cavity and connected to the external water supply device. The water curtain generator has a The annular opening is formed to form a first water curtain covering the gas outlet. The invention is suitable for filtering the corrosion exhaust gas produced by semiconductor factories, and can reduce submicron silicon particles and soluble corrosion gases in the exhaust gas, so as to avoid the accumulation of silicon particles in the exhaust pipes of semiconductor factories and increase pipeline maintenance. Cost, and reduce the suspended particles discharged from the exhaust port of the semiconductor factory, so as to avoid the air pollution caused by the submicron suspended particles discharged by it, which will cause harm to the human body.

Description

technical field [0001] The invention relates to an air filter device capable of reducing silicide by-products, in particular to an air filter device with a specially designed water curtain generator to reduce silicide suspended particles in waste gas discharged from a semiconductor factory. Background technique [0002] The cleaning tower (Wet Scrubber) mainly filters the suspended particles in the gas and the soluble corrosive gas in it by spraying a large amount of water mist. It is usually used in occasions with a large gas flow, such as: the gas discharge system of the factory and the building central air-conditioning system. [0003] figure 1 It is a schematic diagram of an exhaust gas cleaning tower used in a conventional semiconductor factory. As shown in Figure 1, the exhaust gas cleaning tower 10 is connected to an air inlet pipe 1, an exhaust pipe 2 and a water inlet pipe (not shown) respectively, and the air inlet pipe 1 is connected to the air inlet 11 near the...

AI Technical Summary

Problems solved by technology

When these silicon particles coated with water film are discharged from the exhaust port of the whole factory, a large amount of white smoke will be formed, which makes people mistakenly think that the semiconductor factory is emitting waste gas, and damages the goodwill.

[0005] In addition, most of the discharged silicon particles are non-toxic substances such as silicon dioxide and silicon nitride, but because their particle diameter is only a few microns, which is smaller than ordinary dust particles, it is very easy to float in the air with the wind and be inhaled into the human body. The lungs cannot be metabolized and excreted by tracheal cilia. If exposed to this environment for a long time, lung lesions will easily occur

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