Organic EL face-board and making method thereof
An organic and panel technology, applied in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve problems such as resistance reduction, performance deterioration, and current increase
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[0021] Embodiments of the present invention will be described below with reference to the drawings.
[0022] figure 1 Represents the composition of pixels. Here, two TFTs, one capacitor, and one organic EL element EL are formed in one pixel on the active matrix element substrate, but only the driving TFT 40 and the organic EL element EL are shown in this figure.
[0023] In the drawing, the element substrate has a driving TFT 40 formed on a glass substrate 30 . An organic EL element is connected to this driving TFT 40 .
[0024] The driving TFT 40 is formed on the glass substrate 30 with an active layer 40a formed of low temperature polysilicon. Both ends of the active layer 40 a are source regions and drain regions doped with impurities, and the center of these regions is a channel region. A gate electrode 40c is formed above the channel region via a gate insulating film 40b made of silicon oxide. The gate insulating film 40b and the gate electrode 40c are covered by the...
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