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Method of making X-ray combination lenses

A technology for combining lenses and manufacturing methods, which is applied in the fields of lenses, radiation/particle processing, optics, etc., can solve the problems of difficult manufacturing process, poor safety, low yield, etc., and is conducive to batch manufacturing and integration, and has high processing accuracy. , the effect of cost reduction

Inactive Publication Date: 2006-11-15
ZHEJIANG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the deficiencies of low yield, difficult manufacturing process, and poor safety in the prior art, the present invention provides a method for manufacturing an X-ray composite lens with high yield, simple manufacturing process, and good safety

Method used

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  • Method of making X-ray combination lenses
  • Method of making X-ray combination lenses

Examples

Experimental program
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Embodiment 1

[0022] refer to figure 1 , figure 2 , a method for making an X-ray composite lens, comprising the steps of: (A) growing a layer of electroformed cathode film (2) by sputtering or evaporation on a silicon or glass substrate (1) that has been conventionally cleaned, The film (2) is a copper material, where the copper material can be replaced by titanium or nickel or gold or titanium oxide material;

[0023] (B) Coating the first layer of AZP4903 positive photoresist on the electroformed cathode film (2) at a low speed, and baking and curing with a hot plate, the baking temperature is 97.5°C, and the baking time is 8 minutes;

[0024] (C) On the cured first layer of AZP4903 positive photoresist, coat the second layer of AZP4903 positive photoresist at a low speed, and bake and cure with a hot plate, the baking temperature is 90 ° C, and the baking time is 20 minutes;

[0025] (D) carry out photoetching to AZP4903 photoresist with ultraviolet lithography method, and its photoe...

Embodiment 2

[0032] In the technical solution of this embodiment, the electroformed cathode film (2) is titanium material in step (A); in step (B), the baking temperature is 102.5° C., and the baking time is 8 minutes, and the remaining steps are exactly the same as in Example 1. Same.

Embodiment 3

[0034] In the technical solution of this embodiment, the electroformed cathode film (2) is made of nickel material in step (A); in step (B), the baking temperature is 102.5° C., and the baking time is 12 minutes, and the remaining steps are completely the same as in Example 1. Same.

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Abstract

A method for manufacturing an X-ray composite lens, comprising the following steps: (A) growing an electroformed cathode film (2) on a conventionally cleaned substrate (1); (B) growing an electroformed cathode film (2) ) at a low speed to coat the first layer of AZP4903 positive photoresist, and bake and cure, the baking temperature is 97.5°C to 102.5°C, and the baking time is 8 to 12 minutes; Coat the second layer of AZP4903 positive photoresist on the positive photoresist at a low speed, and bake and cure. The baking temperature is 87.5°C to 92.5°C, and the baking time is 18 to 22 minutes; The resist is subjected to photolithography; (E) the sample after photolithography is baked first, and then developed; (F) the cleaned sample is electroformed; (G) the sample is taken out and cleaned with deionized water; (H) the sample Removing the remaining photoresist; (1) etching away the exposed electroformed cathode film (2), and then making it into a metal X-ray composite lens. The invention provides a method for manufacturing an X-ray combined lens with high yield, simple manufacturing process and good safety.

Description

(1) Technical field [0001] The invention relates to an X-ray microstructure optical device, in particular to a manufacturing process of an X-ray combined lens, which is suitable for the occasion of making the X-ray combined lens. (2) Background technology [0002] Creating an X-ray lens was long considered impossible because all materials refract too weakly and absorb too strongly at X-ray wavelengths. In order to realize the focusing of X-ray beams, scientists have successively developed grazing incidence X-ray total reflection mirrors, transmission X-ray zone plates, multilayer films, crystal X-ray Bragg-Fresnel elements and X-ray catheter elements, etc. However, these components are difficult to use in the range of X-ray radiation energy higher than 5keV. In 1996, Snigirev reported an X-ray combination lens that can be used in the high-energy X-ray band. The combined lens has many advantages, such as no need to bend the optical path, good high temperature stability and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00G21K1/00
Inventor 乐孜纯梁静秋董文全必胜
Owner ZHEJIANG UNIV OF TECH
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