Ultra-high resolution liquid crystal display on silicon-on-happhire
A liquid crystal display, sapphire silicon technology, applied in the direction of instruments, transistors, semiconductor devices, etc., can solve the problems of liquid crystal capacitor voltage drop, gray scale change, orientation change, etc.
Inactive Publication Date: 2001-06-13
兰迪·L·希马布库罗 +2
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[0025] Referring to FIG. 1, the present invention requires a display system 10 of a nematic liquid crystal display monolithically integrated with related driving circuits and image processing electronics on a modified ultra-thin sapphire silicon (UTSOS) wafer 11 and a method of manufacturing the integrated structure. The following description will point out the salient features of the present invention and its advantages over the prior art. Improvements, first of the basic building block image unit (pixel), and then of the overall integrated structure, can demonstrate the advantages of the invention both individually and in combination. Thus, the synergistic combination provided by the present invention is non-obvious and represents a significant advance over the prior art. The outstanding advantages of the present invention described herein over the prior art can be more clearly seen from the specification and accompanying drawings. One advantage of the inventive process dis...
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Abstract
A liquid crystal array and associated drive circuitry are monolithically formed on a silicon-on-sapphire structure, and are fabricated by a method comprising the steps of: a) forming an epitaxial silicon layer on a sapphire substrate to create a silicon-on-sapphire structure; b) ion implanting the epitaxial silicon layer; c) annealing the silicon-on-sapphire structure; d) oxidizing the epitaxial silicon layer to form a silicon dioxide layer from a portion of the epitaxial silicon layer so that a thinned epitaxial silicon layer remains; e) removing the silicon dioxide to expose the thinned epitaxial silicon layer; f) fabricating an array of pixels from the thinned epitaxial silicon layer wherein each of the pixels includes a liquid crystal capacitor; and g) fabricating integrated circuitry from the thinned epitaxial silicon layer which is operably coupled to modulate the pixels. The thinned epitaxial silicon supports the fabrication of device quality circuitry on the silicon-on-sapphire structure which is used to control the operation of the pixels.
Description
background of the invention [0001] Liquid crystal displays have been widely used in business applications including portable (laptop) computers, watches, camcorders, large screen televisions, and more. Liquid crystal light valves used as spatial light modulators can be used in projection systems and optical computing applications. The limitations inherent in the prior art are due to the necessity to fabricate displays on transparent glass or quartz substrates which are not suitable for high quality electronic materials. Fabrication of displays on bulk silicon, despite its high crystalline quality, cannot be applied to transmissive applications because the opacity of the substrate unnecessarily confines the display to a reflective mode. The ability to integrate driver circuitry utilizing thin-film transistors (TFTs) with liquid crystal displays improves reliability, allowing the technology to be used in light-duty portable applications. However, to date, integration of displa...
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IPC IPC(8): G02F1/136G02F1/1362G02F1/1368H01L21/336H01L21/77H01L21/8238H01L21/84H01L21/86H01L27/12H01L29/786
CPCH01L27/1214H01L21/86H01L21/8238G02F1/13454H01L29/6678H01L29/78657G02F1/136
Inventor 兰迪·L·希马布库罗斯蒂芬·D·拉塞尔布鲁斯·W·奥福德
Owner 兰迪·L·希马布库罗