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Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof

A technology of microfabrication and information storage, which is applied in information storage, recording information storage, and optical devices, etc. It can solve the problems of time-consuming and cost-intensive detection, and achieve the effect of simplifying the structure, improving the processing quality and resolution

Inactive Publication Date: 2007-05-09
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This not only increases the cost, but also takes a lot of time to find the target when detecting

Method used

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  • Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof
  • Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof
  • Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof

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Experimental program
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Embodiment Construction

[0023] The following description is made item by item in conjunction with the drawings.

[0024] 1. Optical system: As shown in Figure 2, during the two-photon laser processing, the laser light emitted from the laser 1 (such as the femtosecond laser when an ultrafast pulse laser is used) first passes through the front beam expander lens 11 and the rear beam expander The light source beam expansion assembly composed of the lens 10 and the filter hole 2 passes through the two-photon excitation filter 16 to filter out stray light, and the two-photon dichroic mirror 17 reflects it into the objective lens 6, and the objective lens 6 condenses it for processing Light spot. The two-photon excitation filter 16 can transmit corresponding excitation light, and the two-photon dichroic mirror 17 reflects the corresponding excitation light and transmits fluorescence. For example, for a femtosecond laser at 800nm, a two-photon dichroic mirror 17 with a light reflection greater than 750nm and a ...

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Abstract

This invention relates to double photon and co-focus optics process device used in three-dimensional fine processing or high coded information memory and its method. The device comprises optics system, workbench and control system, wherein the optics system comprise double photon source system and single photon source system and each of them is composed of layer, beam expanding elements, color filter pad and color separation lens. The main light path system adopts remote parallel structure without limit and the two paths of the light source system color separation lens is switched to the main path through the switch structure.

Description

Technical field [0001] The present invention relates to optical processing technology, in particular to a three-dimensional optical processing and information storage system designed using the principles of two-photon and confocal laser scanning microscopes and a method for processing or storing using the system. Background technique [0002] Since its invention, confocal microscopes have been mostly used in the field of biomedicine. See US 0313467 (Minsky, 1961) for its patent. In 1990, Cornell University Denk.. WJ, Strikler. JP, Webb. WW and others proposed to apply the two-photon excitation phenomenon to the confocal laser scanning fluorescence microscope, and obtained a US patent (Two-photon laser microscopy, "United States Patent, 5,034,613). For related papers, see Two-photon laser scanning fluorescence microscopy. Science 248, 1990: 73-76. [0003] The basic principle of the optical part of the confocal laser scanning fluorescence microscope is shown in Figure 1. The light...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/00G11B7/00G02B21/00G01B9/04G02B26/00
Inventor 黄文浩夏安东褚家如周拥军蒋中伟袁大军陈德强
Owner UNIV OF SCI & TECH OF CHINA
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