Frequency-dividing self-mixing feedback-type non-contact He-Ne laser micrometer

A laser feedback and frequency splitting technology, applied in lasers, laser parts, instruments, etc., can solve the problems of inability to determine direction, no subdivision function, etc., and achieve the effects of low cost, simple structure and large measurement range.

Inactive Publication Date: 2002-11-13
TSINGHUA UNIV
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Problems solved by technology

[0005] The purpose of the present invention is to provide a frequency-split helium-neon laser (HeNe laser) feedback self-mixing non-contact micrometer, which does not use a common helium-neon laser but uses a frequency-split laser as a light source to overcome the existing The defect that the laser feedback effect interferometer can neither judge the direction nor have the subdivision function constitutes a laser feedback self-mixing non-contact displacement measurement (interferometer) with both the direction judgment ability and the subdivision ability, so that the self-mixing interferometer Can be widely used in practice

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  • Frequency-dividing self-mixing feedback-type non-contact He-Ne laser micrometer
  • Frequency-dividing self-mixing feedback-type non-contact He-Ne laser micrometer
  • Frequency-dividing self-mixing feedback-type non-contact He-Ne laser micrometer

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[0029] The principle, structure and specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.

[0030] figure 1 It is the general structure diagram of the existing laser feedback effect interferometer. figure 2 It is a schematic diagram of the general output curve of the existing laser feedback effect, and shows the change of laser power when the distance between the feedback mirror and the laser output mirror changes.

[0031] Figure 3.1It is a schematic diagram of the principle structure of the present invention. The frequency-split HeNe laser feedback self-mixing non-contact micrometer consists of three parts: a photoelectric detection and processing unit 26 , a frequency-split HeNe laser light source 25 and a prism folding feedback cavity 24 . The object to be measured is 27 . The photoelectric detection and processing unit 26 includes a polarization beam splitter 10 sequentially arranged in the ta...

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Abstract

A non-contact micrometer for measuring displacement, vibration, etc. is composed of a frequency splitting He-Ne laser device as light source, photoelctric detecting and signal processing unit and theobject to be measured with feedback cavity and reflecting surface. The said laser device consists of laser discharging tube, reflector and dual-refracting element able to generate dual refraction effect in the laser cavity. Its advantages are simple structure, low cost, wide measuring range and high resolution up to 1 / 6.

Description

technical field [0001] The invention belongs to the technical field of laser and precision measurement, and in particular relates to the structural design of a helium-neon laser feedback effect self-mixing interferometer (micrometer). Background technique [0002] The laser feedback effect (laser self-mixing interference) means that after the output light of the laser is reflected by an external object, part of the light is fed back to the laser resonator and mixed with the light in the cavity to form the so-called self-interference. When an external object moves in the direction of light propagation, the light fed back into the laser resonator causes the laser's output power to vary (modulate) periodically. The law of change is similar to the interference phenomenon of light. An external object moving half a wavelength changes the optical power by one cycle. Because the characteristics of the output signal are similar to the traditional two-beam interference signal, it is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01D5/26
CPCG01B11/026G01D5/266
Inventor 张书练李岩丁迎春朱钧
Owner TSINGHUA UNIV
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