Method for producing master carrier for magnetic duplication
A production method and carrier technology, which is applied in the manufacture of record carriers, disk-shaped carriers, and alignment of magnetic tracks on magnetic disks, can solve problems such as inability to correspond, and achieve high-quality reproduction and good reproducibility
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[0025] Embodiments of the present invention will be described below with reference to the drawings.
[0026] Next, a method for producing the master carrier for magnetic duplication of the present invention will be described. figure 1 It is a schematic diagram showing the process of creating the original disk of the master carrier for magnetic duplication. figure 2 It is a plan view of the phase servo pattern of the original disk.
[0027] Next, the method of producing the original disk of the master carrier for magnetic duplication of this embodiment will be described. like figure 1 As shown in (a), while rotating the circular substrate 11 made of, for example, glass or quartz in one direction, a positive film dissolved in an organic solvent is applied from the nozzle 13 to the circular substrate 11 by the spin coating method. After drawing the resist solution 12' for the resist 12 with a type electron beam, it is baked.
[0028] Next, if figure 1 As shown in (b), while...
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