Nano sized intellectual driving unit with large feeding force for super precisively machining

A technology for ultra-precision machining and driving components, which is applied in metal processing mechanical parts, manufacturing tools, metal processing and other directions, can solve the problem of small driving force, and achieve the effect of preventing stress concentration, increasing the feed range and ensuring accuracy.

Inactive Publication Date: 2004-02-04
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This type of driver technology is becoming mature, but because the driving force is too small, for example, the maximum pressure that the domestic piezoelectric ceramic driver can withstand is 20Kg, and the maximum pres...

Method used

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  • Nano sized intellectual driving unit with large feeding force for super precisively machining
  • Nano sized intellectual driving unit with large feeding force for super precisively machining
  • Nano sized intellectual driving unit with large feeding force for super precisively machining

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Embodiment Construction

[0015] The key point of the present invention is to use each piece of deformation body with intelligent structure as the actuator, and according to the principle of thermal expansion and cold contraction, by controlling the internal heat source with mesh structure in each piece of deformation body, the temperature field is changed, and then the displacement is controlled. purpose of the field. Since the thermal displacement of the feeding surface of the nanoscale driving component is directly used as active feeding, the research on thermal deformation has shifted from passive compensation to active application. figure 2 Among them, the nano-scale intelligent drive components with large feed force are structurally composed of various deformation bodies in series, the purpose is to expand the feed range as much as possible without changing the feed resolution. In order to facilitate the control and prevent mutual heat conduction between the deformed bodies and between the defor...

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Abstract

A nano-class intelligent driver with high feeding powder for ultraprecision machining is composed of multiple deformable bodies and multiple insulating bodies, all of which are alternatively arranged. Its advantages are symmetrical structure for self-test, adaptive and self-leaning functions, no stress concentration in feeding procedure, high precision and wide feeding range.

Description

technical field [0001] The invention relates to a nanoscale intelligent driving component with large feed force for ultra-precision machining. Background technique [0002] The research on micro / nano-scale driving components mainly focuses on the following two aspects: one is the research on nano-scale driving components with small feed force. With the rapid development of nanoscale technology in the 1980s, the research on nanoscale actuators with small feed force has entered a climax. At present, piezoelectric ceramic actuators, which are most widely used in the field of micro-displacement feeding, have been greatly developed because of their successful application in scanning tunneling microscopes and various scanning probe microscopy (SPM). This type of driver technology is becoming mature, but because the driving force is too small, for example, the maximum pressure that the domestic piezoelectric ceramic driver can withstand is 20Kg, and the m...

Claims

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Application Information

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IPC IPC(8): B23Q1/34B23Q5/00F03G7/06
Inventor 胡旭晓何卫
Owner ZHEJIANG UNIV
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