Acceleration earthquake sensor
A seismic sensor and acceleration technology, which is applied in the direction of seismic signal receivers, etc., can solve the problems of inability to translate, weak overload protection capability, large sensor linearity and temperature drift performance errors, etc., and achieves high working reliability and strong overload protection capability. , good linearity and temperature drift performance
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0010] From figure 1 It can be seen that an acceleration seismic sensor includes an upper electrode 1 , a lower electrode 3 and a movable middle electrode 2 . The middle electrode 2 moves up and down under the action of acceleration, and together with the upper and lower electrodes forms a variable-pitch differential capacitor. The upper electrode 1 and the lower electrode 3 can be made of high silica glass or single crystal silicon. They are grooved electrodes formed by micromachining techniques. The upper electrode 1 and the lower electrode 3 also play the role of overload protection. The middle electrode 2 is sandwiched between the upper electrode 1 and the lower electrode 3, which is based on single crystal silicon with [100] crystal orientation, and is formed by micromachining technology, including a fixed frame 4, a mass block 7, a cantilever beam 5, An integral composite beam structure of the beam 6. The mass block 7 is supported by a composite cantilever beam compo...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com