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Manufacturing method of chlorine-lanthana film sensitive element for detecting carbon dioxide

A technology of lanthanum oxychloride and sensitive components, which is applied in measuring devices, material analysis through electromagnetic means, instruments, etc., can solve the problems of easy failure and low sensitivity, and achieve the effect of low price and simple process

Inactive Publication Date: 2004-11-17
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Both lanthanum-doped tin dioxide and barium titanate materials can be used for carbon dioxide sensors, but they have low sensitivity and are prone to failure in humid environments

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] Example 1: Prepared by sol-gel process, first dissolving lanthanum chloride in ethanol to form a solution, adding acrylamide as a dispersant, heating to reflux for 4 hours, and aging in a 60°C water bath for 24 hours to obtain a sol. Immerse the alumina substrate with the gold electrode and the ruthenium oxide resistance heating layer in advance in the sol, take it out after 10 minutes, and dry it at 110°C. Repeat the immersion-drying process 10 times. A sol film was obtained. The sol thin film obtained above was heat-treated at 600° C. for 5 hours to transform the sol into a gel lanthanum oxychloride layer, thus obtaining a lanthanum oxychloride thin film carbon dioxide sensitive element.

[0017] The pre-made aluminum oxide substrate of the gold electrode and the ruthenium oxide resistance heating layer is prepared as follows: on the aluminum oxide substrate with a size of 3 × 5mm, first use gold paste to paint on both ends of the front and back sides of the substrat...

Embodiment 2

[0020] Embodiment 2: The process steps of this embodiment are exactly the same as those of the above-mentioned embodiment. First, dissolve lanthanum chloride in ethanol to form a solution, add acrylamide as a dispersant, heat and reflux for 6 hours, and then age in a water bath at 80°C for 24 hours to obtain a sol. Immerse the alumina substrate with the gold electrode and the ruthenium oxide resistance heating layer in advance in the sol, take it out after 10 minutes, and dry it at 110°C. Repeat the immersion-drying process 20 times. The sol film obtained above was heat-treated at 600° C. for 5 hours to transform the sol into a gel lanthanum oxychloride layer. A lanthanum oxychloride film carbon dioxide sensitive element was obtained.

[0021] The preparation method of the gold electrode and the aluminum oxide substrate of the ruthenium oxide resistance heating layer prepared in advance is completely the same as that in the first embodiment above.

[0022] The thickness of ...

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Abstract

The invention refers to a kind of lanthanum oxychloride film sensitive element for measuring carbon dioxide and the manufacturing method, which belongs to semiconductor sensor and sensitive element manufacturing process technology field. The invention mainly uses sol-gel process, the character lies in: at first, the lanthanum oxychloride is dissolved in alcohol liquid, and then adds in acrylamide as dispersant, heats and back flows, then it is aged in water, acquires the sol; the preprocessed gold polar and the aluminum oxide lining ruthenium oxide resistance heating layer is immersed in the abovementioned sol, then takes them out to be dried; the element can be acquired through heating process. The product has a high sensitivity; the method is simple, cheap.

Description

technical field [0001] The invention relates to a method for manufacturing a lanthanum oxychloride film sensitive element for detecting carbon dioxide, and belongs to the technical field of semiconductor sensors and sensitive element manufacturing techniques. Background technique [0002] A semiconductor gas sensor refers to a gas sensor made of semiconductor materials plus electrodes and heating resistors. Due to the change of the ambient gas composition, the electrical properties of the semiconductor gas sensor change, and the type and concentration of the gas present in the environment are detected by measuring the resistance of the semiconductor gas sensor. [0003] As we all know, the detection and control of carbon dioxide gas has important applications in many fields, such as air quality, food safety and fire warning. At present, optical and electrochemical sensors are mainly used in the market, but they have the disadvantages of high price and unstable performance. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/407
Inventor 焦正吴明红顾建忠施文彦王艳丽
Owner SHANGHAI UNIV
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