Leakage sensor and leakage detection system
A detection system, sensor technology, applied in the direction of detecting the appearance of fluid at the leak point, using liquid/vacuum for liquid tightness measurement, testing machine/structural parts, etc. Inability to be practical and other problems to achieve the effect of improving reliability
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Embodiment 1
[0066] Below, refer to Figure 1 to Figure 6 , the case where the liquid leakage detection system of the present invention is applied to a coating and developing device for semiconductor wafers (hereinafter referred to as wafers) will be described.
[0067] first, figure 1 It is an example of the liquid leakage detection system 1a which comprises the liquid leakage detection part (liquid leakage sensor) 20a of this invention by integrally forming the liquid leakage sensor part 20a and the alarm member 70a which includes the sounding part 72. is constructed using at least one leak sensor (in figure 1 However, on the same bottom surface and base surface with a large area, a plurality of liquid leakage sensors can also be dispersedly installed in multiple positions) as an example of the liquid leakage detection system 1a, the liquid leakage sensor has at least one The liquid leakage detection part in contact with the leakage liquid through the gas layer permeable to the leaka...
Embodiment 2
[0126] Second, with Figure 1 to Figure 6 Correspondingly expressed Figure 7 to Figure 9 Another embodiment of the liquid leakage detection system 1b and 1c is shown in which the liquid leakage detection part (liquid leakage sensor part) of the present invention is separated into a liquid leakage sensor main body 20b and an alarm part 70b including a sounding part. Numbered devices perform the same function, and, in Figure 7 In the liquid leakage detection system 1b, the liquid leakage sensor 20b and the alarm part 70b provided separately constitute an explosion-proof type liquid leakage detection system 1b through wireless signal relay. In addition, in the liquid leakage detection system 1c, the liquid leakage sensor 20b and The alarm unit 70b provided separately constitutes an explosion-proof liquid leakage detection system 1c relayed by wire.
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Abstract
PROBLEM TO BE SOLVED: To enable it to pinpoint easily a liquid leakage generation part, by using liquid leakage sensors arranged on the floor or at the lowest part of a system such as a liquid leakage accommodation part, when a liquid leakage abnormality occurs.
SOLUTION: The liquid leakage sensor is provided with at least one liquid leakage sensing part which can contact the leaked liquid through a gas layer or a liquid permeating layer where the leaked liquid can permeate. In a liquid leakage sensing system provided with at least one liquid leakage sensor, an alarm means which includes a sounding means within a predetermined space region is established to the installed position of the liquid leakage sensor. When the liquid leakage sensor senses a sensor abnormality, the position of the liquid leakage sensor is pinpointed by using at least the sounding means so that it can be distinguished from the other liquid leakage sensors arranged outside the predetermined space region, and thus, the sensor abnormality of the liquid leakage sensor is alarmed.
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