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Magnetosensitive device based on soft magnetic multilayer film giant magnetic impedance effect

A giant magneto-impedance, multi-layer film technology, applied in the field of sensors, can solve the problems of difficult installation, fragile wire and thin strip, welding of wire and thin strip, etc., to achieve low cost, improve magnetic field sensitivity, and achieve the effect of linearization

Inactive Publication Date: 2005-11-09
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, wires and ribbons will encounter many problems in terms of miniaturization, repeatability of device performance, mass production, and matching with detection circuits, such as welding of wires and ribbons in circuits, difficulty in installation, wire and ribbons Thin strips are easily broken, etc.

Method used

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  • Magnetosensitive device based on soft magnetic multilayer film giant magnetic impedance effect
  • Magnetosensitive device based on soft magnetic multilayer film giant magnetic impedance effect
  • Magnetosensitive device based on soft magnetic multilayer film giant magnetic impedance effect

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Embodiment Construction

[0025] The specific structure of the present invention will be further described below in conjunction with the accompanying drawings.

[0026] Such as Figure 1-3 As shown, the present invention consists of SiO2 Layered silicon substrate 3, pins 4, zigzag sandwich soft magnetic multilayer film 6 of nanocrystalline composition and bias permanent magnet 5, pins 4 are drawn from the copper layers at both ends of the magnetic sensitive device, and are arranged on the belt SiO 2 On the silicon substrate plane of the layer, the soft magnetic multilayer film 6 with a zigzag sandwich structure is located with SiO 2 layer of silicon substrate 3, the bias permanent magnet 5 is located with SiO 2 layer of silicon substrate 3 below.

[0027] The zigzag sandwich structure soft magnetic multilayer film 6 of nanocrystalline composition is a zigzag sandwich structure composed of the middle copper layer 2 and the soft magnetic film 1 of nanocrystalline composition wrapped around the copper ...

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Abstract

This invention relates to a huge magnetic impedance effect magnet-sensitive device based on a soft magnet multiplayer membrane composed of a SiO2 substrate, pins, a zigzag sandwich structure soft magnet multiplayer membrane and an offset magnet, among which, the pins are led out from the copper layers at both ends of the multiplayer membrane and set on the substrate, the entire multiplayer membrane is placed on the substrate. The offset magnet is prepared with fine process technology and adhered on the back of the device with epoxy glue.

Description

technical field [0001] The invention relates to a magnetic sensitive device, in particular to a magnetic sensitive device based on the giant magneto-impedance effect of a soft magnetic multilayer film, and belongs to the technical field of sensors. technical background [0002] With the rapid development of microelectronics technology, some new, miniaturized, high-performance, high-sensitivity and fast-response new magnetic sensors are needed to monitor the environment in automotive electronics, robotics, bioengineering, and automatic control. Surrounding parameters such as: magnetic field, speed, speed, displacement, angle, torque, etc. The magnetosensitive sensors currently being used or developed on the market include Hall effect sensors, anisotropic magnetoresistance (AMR) effect and giant magnetoresistance (GMR) effect sensors. Hall effect sensor is the most widely used magnetic sensor at present, which can be used for the measurement of automobile engine speed, igniti...

Claims

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Application Information

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IPC IPC(8): H01L43/08
Inventor 周勇丁文曹莹陈吉安周志敏
Owner SHANGHAI JIAO TONG UNIV
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