3results about How to "Avoid fragile" patented technology

The utility model relates to a heat supply unit automatic exhaust equipment technical field, specifically speaking is a kind of heat supply unit primary network supplement secondary network automatic exhaust device, including jar body, the water inlet pipe and water outlet pipe for supplementing water are provided in the jar body periphery;Water source after the turbulence of the type plate will enter conical pipe, the spiral groove of conical pipe inner periphery is convenient to the water source and makes water source form spiral force pass through conical pipe and enter the bottom side of jar body, simultaneously, small particle solid and float carried in water source can be thrown to the inner wall on the bottom side of jar body under the centrifugal force generated by spiral conveying, and it is convenient to settle in jar body bottom, and the conical pipe of conical structure is convenient to the interception of small particle solid and float, and the vertical pipe of ring seat inner periphery in the bottom of conical pipe can be convenient to the water source of reflux and spiral conveying and shunt, to further reduce the condition that small particle solid and float are moved by water source and move accordingly.

The application discloses a process chamber, an upper electrode device thereof and a semiconductor process equipment. The upper electrode device comprises a radio frequency coil (11) and an adjustable capacitor (12). The radio frequency coil (11) is used for being wound outside a shielding cylinder (70) of the process chamber, and the shielding cylinder (70) is used for being sleeved outside a plasma generating cavity (20) of the process chamber. The adjustable capacitor (12) is connected in series with the radio frequency coil (11), and the adjustable capacitor (12) is used for being adjusted to different capacitance values in an ignition stage and a reaction stage of the process chamber. The above scheme can solve the problems of ignition difficulty and plasma bombardment on a dielectric window, and can also relieve the problem of abnormal discharge caused by the adoption of a lifting structure of the radio frequency coil.

This utility model relates to the technical field of floor grinding equipment, and discloses a cycloidal assembly and its floor grinding robot. The assembly includes a connecting part, a first swing arm, a second swing arm, a first hook, and a second hook. The connecting part is connected to one end of the first swing arm, the middle of the first swing arm is pivotally connected to one end of the second swing arm, and the other end of the second swing arm is connected to the second hook. The first hook is disposed on the first swing arm and is located between the second swing arm and the connecting part. The connecting part is used to pivotally connect the floor grinding robot. By using the cycloidal assembly, the power cord can be properly fixed at the end near the floor grinding robot. Simultaneously, the power cord gains horizontal rotational freedom by following the swing of the second swing arm, solving the problem of the power cord easily getting caught in the bottom of the floor grinding robot during movement. It also solves the problem of restricted movement of the floor grinding robot if the power cord is fixed.