Cleaning apparatus

A cleaning device and cleaning liquid technology, which are applied in the directions of cleaning flexible objects, cleaning methods and utensils, cleaning methods using liquids, etc., can solve the problems of inability to use semiconductor process lithography technology, etc., to suppress the reduction of precision and avoid cost increase. Great, the effect of suppressing environmental pollution
CN1746331AActive Publication Date: 2006-03-15SANYO ELECTRIC CO LTD +2
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SANYO ELECTRIC CO LTD
Publication Date
2006-03-15

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Abstract

A cleaning device capable of eliminating the organic material attached to a mask consisting of metallic film is provided with a first rinse bath and a second rinse bath (21, 22), a vacuum still (30), a first cooler (31), a first backflow tube (101), a first wash tank and a second wash tank (51, 52), a non-pressurized distiller (60), a second cooler (61) and a second backflow tube (102), wherein the rinse baths (21, 22) clean the mask (10) by means of preselected rinse solution; the vacuum still (30) completes vacuum distillation of the rinse solution in the rinse baths (21, 22); the first cooler (31) cools down the vacuum-distilled rinse solution to room temperature; the first backflow tube (101) ensures that the rinse solution cooled down by the first cooler (31) flows back to the second rinse bath (22); the wash tanks (51, 52) wash the mask (10) by means of preselected rinse solution; the non-pressurized distiller (60) completes the distillation of the rinse solution in the wash tanks (51, 52) under ordinary pressure; the second cooler (61) cools down the atmospheric-distilled rinse solution to room temperature; moreover, the second backflow tube (102) ensures that the rinse solution cooled down by the second cooler (61) flows back to the second wash tank (52).
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Description

technical field

[0001] The present invention relates to a cleaning device, and more particularly to a cleaning device for removing organic material adhering to a mask made of a metal thin film in a vapor deposition step of an organic material for organic EL. Background technique

[0002] In recent years, organic EL display devices using organic electroluminescent (Electro Luminescence: hereinafter referred to as "organic EL") components have replaced CRT and LCD display devices and have been attracting attention. An organic EL display device of a thin film transistor (Thin Film Transistor: hereinafter referred to as "TFT") of an EL device.

[0003] The organic EL components are sequentially stacked to form: the anode formed by transparent electrodes such as ITO (Indium Tin Oxide) and the like; the anode formed by MTDATA (4,4-bis(3-methylphenylaniline) A hole-transporting layer composed of a first hole-transporting layer such as TPD (4,4,4-tris(3-methylphenylanilino)tripheny...

Claims

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