Compound semiconductor integrated optical fiber gyro chip

A technology of fiber optic gyroscope and integrated optics, applied in the direction of Sagnac effect gyroscope, etc., can solve the problems of difficult monolithic integration, radiation resistance, poor impact resistance, temperature drift, etc., to reduce transmission loss and increase production capacity Tolerance, the effect of reducing the attenuation coefficient

Inactive Publication Date: 2006-11-15
ZHEJIANG UNIV
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Problems solved by technology

[0012] The object of the present invention is to provide a kind of compound semiconductor integrated optical fiber gyroscope chip, adopt based on compound semiconductor substrate, overcome some LiNbO

Method used

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  • Compound semiconductor integrated optical fiber gyro chip
  • Compound semiconductor integrated optical fiber gyro chip
  • Compound semiconductor integrated optical fiber gyro chip

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Embodiment Construction

[0033] See for reference figure 1 and figure 2 , based on the compound semiconductor substrate proposed by the present invention, such as GaAs or InP, the manufacturing principle of designing and manufacturing an integrated optical interference type fiber optic gyroscope is as follows:

[0034] Such as figure 1 As shown, a compound semiconductor integrated optical fiber gyroscope chip, the waveguide structure of the Y branch output arm with the electrode part includes an electrode 1, a waveguide upper cladding layer 2, a waveguide core layer 3, a waveguide lower cladding layer 4 and a lining from top to bottom. Bottom 5. The waveguide lower cladding layer 4 to the waveguide upper wave layer 2 constitute double heterojunction or single heterojunction epitaxial materials, and the substrate 5 is a compound semiconductor material. The structure of the double heterojunction is as above, with a total of 5 layers; if it is a single heterojunction, it includes electrode 1, wavegui...

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Abstract

The present invention discloses a compound semiconductor integrated optical fibre-optic gyro chip. Its waveguide upper cladding and lower cladding are made up by using double heterojunction or single heterojunction epitaxial material, its substrate is compound semiconductor material, and the internal breakout position of Y branch waveguide is formed into semi-rectangular or semi-elliptical form, its external breakout position adopts fold line or curved line. Between the connected corner position of Y branch waveguide output and horizontal arm and horizontal branch arm a transition structure is added, in said structure the beam is expanded firstly, then the beam is contracted, then said structure is connected with the horizontal branch arm. Said integrated optical chip mainly uses one Y branch waveguide as power divider, and uses two phase modulators, at the same time, uses them as TE/TM mode polarizer. Said phase modulator adopts upper and lower electrodes structure, said upper electrode can be directly covered on the ridge waveguide.

Description

technical field [0001] The invention relates to an optical fiber gyroscope, in particular to a compound semiconductor integrated optical fiber gyroscope chip. Background technique [0002] Fiber optic gyroscopes are widely used in military and civilian applications. The fiber optic gyroscope is the key technology in the development of the next generation of accurate strike weapon technology. In the field of national defense, the precise guidance of missiles, the precise navigation of submarines lurking underwater for a long time, and the stability of artillery and targeting systems of moving tanks are all inseparable. Gyro. In the field of national economy, the precise positioning of engineering surveys, the precise orientation of oil drilling, and the precise control of robot movements also rely on gyroscopes. Even in daily life, people have or will benefit from gyroscopes unconsciously. For example, the aircraft makes passengers feel very stable and comfortable during f...

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Application Information

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IPC IPC(8): G01C19/72
Inventor 周剑英王明华江晓清杨建义李锡华周强
Owner ZHEJIANG UNIV
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