Compound semiconductor integrated optical fiber gyro chip
A technology of fiber optic gyroscope and integrated optics, applied in the direction of Sagnac effect gyroscope, etc., can solve the problems of difficult monolithic integration, radiation resistance, poor impact resistance, temperature drift, etc., to reduce transmission loss and increase production capacity Tolerance, the effect of reducing the attenuation coefficient
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[0033] See for reference figure 1 and figure 2 , based on the compound semiconductor substrate proposed by the present invention, such as GaAs or InP, the manufacturing principle of designing and manufacturing an integrated optical interference type fiber optic gyroscope is as follows:
[0034] Such as figure 1 As shown, a compound semiconductor integrated optical fiber gyroscope chip, the waveguide structure of the Y branch output arm with the electrode part includes an electrode 1, a waveguide upper cladding layer 2, a waveguide core layer 3, a waveguide lower cladding layer 4 and a lining from top to bottom. Bottom 5. The waveguide lower cladding layer 4 to the waveguide upper wave layer 2 constitute double heterojunction or single heterojunction epitaxial materials, and the substrate 5 is a compound semiconductor material. The structure of the double heterojunction is as above, with a total of 5 layers; if it is a single heterojunction, it includes electrode 1, wavegui...
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