The invention discloses a silicon-based waveguide MEMS optical switch based on electrostatic comb driving, and an N * N array. The optical switch is mainly composed of two separated crossed waveguidemirrors and an electrostatic comb drive. A crossed waveguide is composed of two crossed wide waveguides and four heat insulation conical waveguides; the electrostatic comb drive comprises an electrostatic comb, an island spring structure and a transmission rod; the electrostatic comb is of a pair of comb tooth structures, and other parts of the electrostatic comb are kept grounded by applying voltage to fixed comb teeth; and under the action of electrostatic force, the movable comb teeth move towards the fixed comb teeth, a spring deforms, the movable crossed waveguide mirror is pushed by thetransmission rod to move towards the fixed crossed waveguide mirror, and the separated crossed waveguide mirror is recombined into a complete crossed waveguide. The output optical path of the opticalswitch is regulated and controlled by the electrostatic comb drive, the 2 * 2 optical switch unit with low loss and high extinction ratio and the N * N array are finally realized, and the optical switch has the outstanding advantages of large bandwidth, low loss, high extinction ratio, low energy consumption, simple structure, convenience in control, simple and convenient process and the like.