The invention provides a
silicon-
lithium niobate heterogeneity integrated scanning
chip. The
chip comprises a
lithium niobate substrate, a silica cladding layer, and a
silicon waveguide based core layer. The silica cladding layer is attached to the
lithium niobate substrate. The core layer comprises an
optical beam splitting unit, a curved
waveguide, a thermo-optical phase shifter, and an emergentwaveguide array. The
optical beam splitting unit, the curved
waveguide, and the emergent
waveguide array are located in the silica cladding layer. The thermo-optical phase shifter is disposed on thesilica cladding layer and is located on the curved waveguide. The
optical beam splitting unit comprises a plurality of
silicon waveguide based
beam splitters. According to the silicon-lithium niobateheterogeneity integrated scanning
chip, the silicon waveguide substrate is integrated with the heterogeneity of the
lithium niobate material, and thermo-optic modulation is used based on the optical
phased array technology, so as to change the the
refractive index of the waveguide, change the phase of the beam, and deflect the exit direction, thereby obtaining a high-speed low-loss optical modulation chip structure of 1520nm to 1620nm
optical communication waveband. The invention further provides a preparation method and application of the chip.