On-chip integrated part reflector based on partial transmission-type corner reflector group

Abstract

The invention discloses an on-chip integrated part reflector based on a partial transmission-type corner reflector group. The on-chip integrated part reflector comprises an input waveguide, an outputwaveguide and the partial transmission-type corner reflector group connected between the input waveguide and the output waveguide, wherein the partial transmission-type corner reflector group is composed of a first reflector, a center transmission region and a second reflector, the reflective faces of the first reflector and the second reflector face the input waveguide, and a corner reflector of90 degrees or other degrees is constituted; the input end of the partial transmission-type corner reflector group is connected with the input waveguide through a beam expander, the output end of the partial transmission-type corner reflector group is connected with the output waveguide through an energy coupler, and the input waveguide and the output waveguide can be at any depth. The on-chip integrated part reflector is used for integrated optical chips, and the random transmissivity and the reflectivity allocation within the wide wavelength range can be achieved. The on-chip integrated partreflector is simple in structure, low in loss and large in manufacturing allowance.

Description

technical field [0001] The invention relates to an on-chip integrated partial reflector in the field of integrated optical chips, in particular to an on-chip integrated partial reflector based on a partially transmissive corner reflector group. Background technique [0002] Integrated optical technology is one of the cutting-edge technologies in today's optical development. With the rapid development of the Internet industry, the market demand for optical communication devices with high bandwidth, high flexibility, and low cost is increasing. Large-scale integrated optical chip (photonic integrated circuit, PIC) technology is a feasible solution to meet this demand. By integrating active components such as lasers, modulators, amplifiers, detectors, and passive components such as splitters, attenuators, isolators, wavelength division multiplexers / demultiplexers, etc. on the same chip, the integrated Optical chips can provide higher bandwidth in an extremely small size, with...

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Problems solved by technology

However, in order to reduce the diffraction loss, the width of the etching groove should not be too large, generally in the same order of magnitude as the wavelength, and the etching quality of the deep etching groove that is too narrow cannot be guaranteed, and if the deep etching surface is too rough, it will introduce great loss

In addition, the transmittance and reflectance of deep etched grooves are very sensitive to the width of the groove, and it is difficult to ensure the manufacturing accuracy in actual production

At the same time, for structures that use etched grooves to achieve partial reflection effects, the transmittance and reflectivity are only related to the width of the deep etched grooves, and only one parameter can be changed during design, which has great limitations

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