Ceria serosity combination with reinforced polishing uniformity
A polishing slurry, ceria technology, applied in polishing compositions containing abrasives, other chemical processes, chemical instruments and methods, etc., can solve the problems of wafer surface uniformity deterioration, device reliability deterioration, circuit resistance increase and other problems , to improve polishing uniformity, reduce pitting and erosion
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Embodiment 1-7 and comparative Embodiment 1-2
[0024] In order to evaluate the quality of the ceria slurry, a CMP slurry composition was prepared as described below, and the CMP composition was used for chemical mechanical polishing. First, in order to evaluate the effects of polycarboxylic acid and xylitol, the CMP slurry composition was prepared. The CMP slurry composition included 1.0% by weight of cerium dioxide and polyacrylic acid (weight average molecular weight) in an amount as shown in Table 1. 300,000) and xylitol, the rest is deionized water. TMAH is used to control the pH of the slurry. In order to evaluate the polishing effect of the slurry composition, a high density plasma (HDP) method was used to deposit Thickness of SiO 2 Floor. And use low pressure CVD method to deposit Thickness of the silicon nitride layer. The field oxide layer and the silicon nitride layer were polished with the "MomantumTM" polishing equipment manufactured by Speedfam, the "IC1400 pad" manufactured by Rodel, and the above-mentione...
Embodiment 8-10 and comparative Embodiment 3
[0029] In order to measure the depression on the polished wafer, a CMP slurry composition was prepared as shown in Table 2, and chemical mechanical polishing was performed. The prepared CMP slurry composition includes 1.0% by weight of cerium oxide, polyacrylic acid (weight average molecular weight of 200,000) and polyethylene glycol in the amount shown in Table 2, and the rest is deionized water. TMAH is used to control the pH of the slurry. Then, polishing was performed and the quality of the slurry composition was measured in the same manner as described in Example 1. The polishing test was performed with "STI 3 patterned wafer" manufactured by SKW Corporation.
[0030] [Table 2]
[0031]
[0032] As shown in Table 2, the slurry composition containing the polycarboxylic acid or its salt and the alcohol compound shows excellent polishing selectivity of the field oxide layer to the silicon nitride layer and relatively few pits.
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