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Patterned substrate, method of manufacturing the same, magnetic recording media, and magnetic recording apparatus

A magnetic recording medium and magnetic recording technology, applied in magnetic recording, different record carrier forms, data recording, etc., can solve the problems of cost increase and recording density cannot be improved

Inactive Publication Date: 2007-01-31
KK TOSHIBA +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this magnetic recording medium is not a discrete track medium, so its recording density cannot be increased
Further, this magnetic recording medium requires texturing for each disk, resulting in increased cost

Method used

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  • Patterned substrate, method of manufacturing the same, magnetic recording media, and magnetic recording apparatus
  • Patterned substrate, method of manufacturing the same, magnetic recording media, and magnetic recording apparatus
  • Patterned substrate, method of manufacturing the same, magnetic recording media, and magnetic recording apparatus

Examples

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example 1

[0031] Reference below Figure 8A , 8B, 8C, 8D, 8E, 8F, 8G, 8H, 8I, and 8J, describe an example of a method of manufacturing a patterned substrate having a pattern of protrusions and depressions. The method in this example is divided into (A) master plate preparation, (B) resist coating, (C) drawing and development of raised and recessed patterns (D), master plate etching, (E) parenting Stamp electroforming, (F) sub stamp electroforming, (G) texturing, (H) resist coating of substrate, (I) imprinting, and (J) etching of substrate. These steps are described below.

[0032] (A) Prepare a silicon wafer with a diameter of 6 inches and a thickness of 1.0 mm as the mother board 1 . (B) An electron beam-sensitive resist was spin-coated on the master 1 to a thickness of 70 nm. (C) Using an electron beam drawing apparatus, pattern exposure of the resist 2 is performed. The graphics include tracks and clothing marks. Immerse the master 1 in the developer solution and let the resist ...

example 2

[0037] Reference below Figure 9A , 9B, 9C, 9D, 9E, 9F, 9G, 9H, 9I, and 9J, describe another example of a method of manufacturing a patterned substrate having a pattern of protrusions and depressions. The method in this example is divided into (A) master plate preparation, (B) texturing treatment, (C) resist coating, (D) drawing and development of raised and recessed patterns, (E) etching of master plate Etching, (F) electroforming of parent stamp, (G) electroforming of child stamp, (H) resist coating of substrate, (I) imprinting, and (J) etching of substrate. These steps are described below.

[0038] (A) Prepare a silicon wafer with a diameter of 6 inches and a thickness of 1.0 mm as the mother board 1 . (B) Texture processing is performed on the master board 1 with a tape texturing machine. A strap is placed to clamp the die 32 along its radius. When an abrasive containing diamond particles with an average size of 100 nm was applied to the belt moving in the radial direc...

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Abstract

According to one embodiment, a patterned substrate used for a magnetic recording media having discrete tracks includes patterns of protrusions and recesses processed thereon, and a texture structure formed on each of the recesses.

Description

technical field [0001] The present invention relates to a patterned substrate having a pattern of protrusions and depressions for discrete track media, a method of manufacturing such a patterned substrate, and a magnetic recording medium (substrate processing type discrete track) using such a patterned substrate medium), and a magnetic recording apparatus using this magnetic recording medium. Background technique [0002] Recent magnetic recording media are further required to increase density and improve signal-to-noise ratio (SNR). To increase the density of magnetic recording media, a discrete track structure is effectively used in which adjacent tracks are isolated from each other by isolation trenches or non-magnetic media. [0003] It is also known that a process of texturing the substrate is effective for improving SNR. The reason is as follows. When a liner is deposited on a flat substrate, the material of the liner is randomly oriented and the magnetic recording ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/82G11B5/84
CPCG11B5/855G11B5/865G11B5/82
Inventor 樱井正敏喜喜津哲冈正裕
Owner KK TOSHIBA