Patterned substrate, method of manufacturing the same, magnetic recording media, and magnetic recording apparatus
A magnetic recording medium and magnetic recording technology, applied in magnetic recording, different record carrier forms, data recording, etc., can solve the problems of cost increase and recording density cannot be improved
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example 1
[0031] Reference below Figure 8A , 8B, 8C, 8D, 8E, 8F, 8G, 8H, 8I, and 8J, describe an example of a method of manufacturing a patterned substrate having a pattern of protrusions and depressions. The method in this example is divided into (A) master plate preparation, (B) resist coating, (C) drawing and development of raised and recessed patterns (D), master plate etching, (E) parenting Stamp electroforming, (F) sub stamp electroforming, (G) texturing, (H) resist coating of substrate, (I) imprinting, and (J) etching of substrate. These steps are described below.
[0032] (A) Prepare a silicon wafer with a diameter of 6 inches and a thickness of 1.0 mm as the mother board 1 . (B) An electron beam-sensitive resist was spin-coated on the master 1 to a thickness of 70 nm. (C) Using an electron beam drawing apparatus, pattern exposure of the resist 2 is performed. The graphics include tracks and clothing marks. Immerse the master 1 in the developer solution and let the resist ...
example 2
[0037] Reference below Figure 9A , 9B, 9C, 9D, 9E, 9F, 9G, 9H, 9I, and 9J, describe another example of a method of manufacturing a patterned substrate having a pattern of protrusions and depressions. The method in this example is divided into (A) master plate preparation, (B) texturing treatment, (C) resist coating, (D) drawing and development of raised and recessed patterns, (E) etching of master plate Etching, (F) electroforming of parent stamp, (G) electroforming of child stamp, (H) resist coating of substrate, (I) imprinting, and (J) etching of substrate. These steps are described below.
[0038] (A) Prepare a silicon wafer with a diameter of 6 inches and a thickness of 1.0 mm as the mother board 1 . (B) Texture processing is performed on the master board 1 with a tape texturing machine. A strap is placed to clamp the die 32 along its radius. When an abrasive containing diamond particles with an average size of 100 nm was applied to the belt moving in the radial direc...
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