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Plasma discharger

A technology of plasma and discharger, which is applied in the field of plasma discharger and can solve problems such as the complexity of discharger

Inactive Publication Date: 2007-02-07
巴尔工业公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that processing is performed while the workpiece moves horizontally or the discharger moves horizontally, thereby complicating the discharger

Method used

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  • Plasma discharger
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Embodiment Construction

[0017] The accompanying drawing shows an embodiment of the invention, figure 1 It is the enlarged drawing of the main part, figure 2 is the front view of the plasma arrester, and image 3 A side view of the plasma arrester.

[0018] The plasma discharger is composed of the following components: a platform (2), including a rotary drive mechanism not shown, and a turntable (1) on which a disc-shaped workpiece (W) will be placed and fixed protrudes from the upper surface; a discharge head A unit (3), facing the platform (2) from the upper side; and a support member (4), supporting the discharge head unit (3) in a vertically movable manner.

[0019] An electrode assembly (5) is formed on the lower end portion of the discharge head unit (3). The electrode assembly (5) has: a pair of discharge electrodes (6) (7); an insulating refractory material (8) in which openings are formed and made of ceramic (alumina); and an electrode support made of insulating resin member (9), and the...

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PUM

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Abstract

A plasma discharger in which, even on a rotating disk-like workpiece, a uniform energy distribution can be obtained over a wide range is provided. In a plasma discharger in which a pulse voltage is applied to a pair of rod-like discharge electrodes (6) (7) to produce a corona discharge between the discharge electrodes (6) (7), and the surface of a workpiece (W) is irradiated with excited species including plasma produced by the corona discharge, the pair of rod-like discharge electrodes (6) (7) are formed into an asymmetrical shape, and one discharge electrode (6) is formed into a substantially L-like shape. A pointed end (6a) of the discharge electrode (6) is located in an outer peripheral portion of the disk-like workpiece (W) which is treated while involving rotation, a bend-continuous basal end portion of the other discharge electrode (7) which is formed into a substantially V-like shape is located in a rotation center portion of the disk-like workpiece (W) which is treated while involving rotation, and the pointed end (6a) of one discharge electrode (6) and the pointed end (7a) of the other discharge electrode (7) are located at different phase heights on an axis along a plasma ejecting direction.

Description

technical field [0001] The present invention mainly provides a plasma discharger, which is applied to various surface treatments, such as cleaning organic matter attached to the surface of a rotating disc-shaped workpiece, disinfection or sterilization, and etching, and more particularly relates to an electric discharger Plasma discharger of the corona discharge type in which the surface of a workpiece is irradiated by using excited species such as excited molecules, atomic groups or ions produced as a result of molecular dissociation by the plasma produced by the corona discharge , to carry out surface treatment such as improvement. Background technique [0002] The advantage of corona discharge plasma arresters is that the use of ignition gases such as helium, argon or hydrogen, which are required in glow discharge plasma surface treatment methods, can be dispensed with and a reduction in gas consumption can be achieved As a result, the safety of use is improved and the p...

Claims

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Application Information

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IPC IPC(8): H05H1/24C08J7/00B01J19/08H01T19/00
CPCH05H1/24H05H1/471H05H2245/36
Inventor 佐伯登三好照一
Owner 巴尔工业公司