Method and apparatus for vacuum deposition by vaporizing metals and metal alloys

Abstract

The invention relates to a method and device for vacuum deposition by thermal evaporation of metals and alloys. The offered device (figure 1) contains a melting crucible (1) with molten material (liquid metal) (2), one or several crucibles (3) of evaporation device (4) in a vacuum chamber (5), a heated liquid-metal pipe (6), connecting the said melting crucible to the said evaporation crucibles through a magnetohydrodynamic (MHD) circuit (7) of static melt pressure. The circuit (7) is provided with an MHD pump (8) and incorporates the liquid-metal pipe (6) sectors, which are adjacent to the MHD pump, heated liquid-metal pipes (9, 10) and (11), a heated reservoir (13), connected to the liquid-metal pipe (6) sector before the MHD pipe through the liquid-metal pipe (11) and to an expander (12), installed in the said pipe (9), through the liquid-metal pipe (10). Spaces above the melt in the expander and reservoir are interlinked with a pipe (14), connected to a vacuum pumping system (not shown). Two electrical sensors (15) of the melt level L are installed in the expander. The melt level L in the expander and in the evaporator is delta h high relative the melt level L0 in the MHD circuit reservoir, i.e. the MHD pump should provide pressure delta h. The present technical solution allows increasing the stability of metals and alloys evaporation in long-run processes and thus increasing the productivity. The solution may be used for the deposition of various functional coatings in electronics, metallurgy, mechanical engineering. It is possible to evaporate zinc, magnesium, cadmium, lithium, zinc-magnesium alloy with this method.

Description

technical field [0001] The present invention relates to vacuum deposition technology, which is mainly used for coating roll-shaped substrates by thermal evaporation of metals and alloys in continuous or semi-continuous commercial equipment. Background technique [0002] Methods and equipment for depositing anti-corrosion coatings in metallurgical technology, active layers in the manufacture of chemical power sources, various functional coatings in electronics and other technical fields by evaporating metals have been intensively studied. Generally, metals and alloys such as zinc, magnesium, cadmium, and zinc-magnesium alloys are mainly used to achieve these purposes. [0003] In industrial processing, large quantities of these materials need to be evaporated continuously, sometimes tens of kilograms, sometimes hundreds of kilograms. It is difficult to maintain such a large amount of evaporating material at an evaporating temperature (usually, such a temperature is not lower...

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Problems solved by technology

The impure substances and the melt can enter the evaporator toget...

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