Cluster controller for etching devices

Abstract

A cluster controller of etching machine consists of input unit for inputting data into controller, storage unit for storing data, output unit for displaying monitor state, CPU for executing control information, transmission unit being used to connect with etching machine and process module for outputting control information to etching machine according to condition required by process flow stored in said module.

Description

technical field [0001] The invention relates to the field of automatic control, in particular to an etching machine cluster controller in a semiconductor etching process. Background technique [0002] Modern large-scale integrated circuit manufacturing requires the use of dozens of process equipment for hundreds of processes. The equipment in an integrated circuit manufacturing plant is usually divided into several areas such as deposition, lithography, etching, and diffusion. Each The areas are all composed of semiconductor equipment processed by the same or similar process. The factory material transfer / management system transfers materials between different regions, while the manufacturing execution system (MES) is responsible for coordinating the entire silicon wafer production process, and it manages the coordination of materials between different machines in different regions in a unified manner, and then completes The entire complex semiconductor process manufacturin...

AI Technical Summary

Problems solved by technology

[0003] At present, no matter for 200mm or 300mm semiconductor process equipment, my country has not independently developed a cluster controller (CTC) to complete the monitoring functions of the transmission module (TM) and process module (PM) of the 200mm etching machine.

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