Micro channel electrode and miniflow control analysis chip

A technology of microfluidic analysis and microchannel, which is applied in the direction of material electrochemical variables, material inspection products, biological testing, etc., can solve the problems of high mask precision requirements, high channel alignment technology, and high product scrap rate. Achieve the effect of high aspect ratio, simple structure and easy production
CN1963483AInactive Publication Date: 2007-05-16WUHAN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
WUHAN UNIV
Publication Date
2007-05-16
Estimated Expiration
Not applicable · inactive patent

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Abstract

This invention relates to micro groove electrode, which has electrode and is characterized by the following: the groove electrode is composed of conductive flow and conductive hole needle inserted into conductive part. This invention is of simple structure and easy for processing with low cost and with even electricity field more than 100KV / cm suitable for processing large area field micro flow control analysis chip.
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Description

technical field

[0001] The invention relates to a microchannel electrode in a microfluidic analysis chip and a microfluidic analysis chip made of the electrode, belonging to the technical field of microelectromechanical processing; meanwhile, the strong electric field provided by the electrode can be used to separate particles of different electrical properties, It can be used as a powerful tool for biochemical analysis; in addition, this electrode has a uniform large-area field strength, which can be used for material impedance analysis, electric field simulation, etc. Background technique

[0002] Electrode fabrication is an essential technology in microfluidic analysis chips, and is an indispensable integrated component for electrical signal detection, protein separation, cell perforation, impedance analysis and other technologies. The conventional electrode fabrication method is to use traditional photolithography process to coat the substrate, which has the following di...

Claims

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