Real-time measuring device for high precision thin-film stress and measuring method

A thin-film stress and real-time measurement technology is applied in the direction of measuring devices, measurement of the change force of the optical properties of the material when it is stressed, and instruments. It can solve the problems of less understanding of stress changes and insufficient depth of thin-film stress. Easy adjustment and maintenance, friendly interface, high precision effect

Inactive Publication Date: 2007-05-30
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

So far, the understanding of the stress of the film is not deep enough, e

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  • Real-time measuring device for high precision thin-film stress and measuring method
  • Real-time measuring device for high precision thin-film stress and measuring method
  • Real-time measuring device for high precision thin-film stress and measuring method

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Embodiment Construction

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited by this.

[0027] Please refer to FIG. 1 first. FIG. 1 is a schematic diagram of the overall structure of the high-precision thin-film stress real-time measuring device of the present invention. The second reflecting mirror 3-2, the third reflecting mirror 3-3, the photoelectric potential-sensitive detector 5, the A / D data acquisition card 6 and the computer 7 are composed, and their positional relationship is as follows: Observation in the vacuum chamber 8 of any coating machine The He-Ne laser 1, the photoelectric potential-sensitive detector 5, the A / D data acquisition card 6 and the computer 7 are arranged outside the window 2, and the first reflecting mirror 3-1 is arranged in the vacuum chamber 8 of the coating machine. , the second reflection mirror 3-2, the third reflection mirr...

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Abstract

The invention supplies a real-time measurement device and method of high-accuracy membrane stress that comprises the He-Ne laser, reflector, light-sensitive detector, A/D data acquisition card and computer. The whole device can be mounted on any coater conveniently, the He-Ne laser, reflector, light-sensitive detector, A/D data acquisition card and computer are out of the coater, and the laser beam enters the coated room via observation window of the coater and irradiated to substrate by adjusting of the reflector, the reflected beam is adjusted by the reflector and out from the observation window, the light-sensitive detector detects the deflection shift of the reflected beam, the data acquisition card collects the analog signal of the light-sensitive detector and transfers the analog signal to digital signal which is sent to computer. The stress variation of film can be real-time monitored by the process of signal. The invention characterized in that the structure is simple, the accuracy is high, data processing is easy, and the compatibility with coater is strong.

Description

technical field [0001] The invention is related to thin films, in particular to a high-precision real-time measuring device and measuring method of thin film stress. technical background [0002] Film stress is an important mechanical parameter of the film. Almost all films are in a certain state of stress. If the compressive stress is too high, the film will wrinkle, and if the tensile stress is too high, the film will crack. , Thin film electronic components, thin film optical components and thin film magnetic media have extremely adverse effects on the yield, stability, reliability and service life. In a strong laser system, the deformation of the substrate caused by stress not only causes changes in optical properties and mechanical properties, but more importantly, under the laser irradiation, the thermal coupling of the thin film is accelerated due to the existence of prestress, making it a thin film. susceptibility to damage. So far, the understanding of film stress...

Claims

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Application Information

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IPC IPC(8): G01N21/19G01L1/24
Inventor 申雁鸣朱美萍郭世海夏志林邵建达贺洪波易葵范正修邵淑英
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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