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Method for in situ preparation of antimony-doped silicon and silicon germanium films

a technology of antimony-doped silicon and germanium film, which is applied in the field of in situ formation of antimony-doped silicon or silicon germanium film, can solve the problems of unsuitable mass production technique and poor step coverage of mb

Active Publication Date: 2021-12-28
SUNRISE MEMORY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

Enables the formation of antimony-doped silicon films with minimal diffusion and low activation temperature, suitable for 3-D memory circuits, reducing processing steps and maintaining sharp junctions, while providing good step coverage and control over dopant distribution.

Problems solved by technology

However, MBE is not an appropriate mass production technique and does not have good step coverage.

Method used

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  • Method for in situ preparation of antimony-doped silicon and silicon germanium films
  • Method for in situ preparation of antimony-doped silicon and silicon germanium films

Examples

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Embodiment Construction

[0020]Antimony-doped silicon films can be deposited by low pressure chemical vapor deposition (LPCVD) techniques. In such an LPCVD process, source gases of antimony may include, for example, trimethylantimony (TMSb) and triethylantimony (TESb). See, e.g., the articles: (i) “The metal-organic chemical vapor deposition and properties of III-V antimony-based semiconductor materials,” by Robert Biefield, Materials Science and Engineering R 36 (2002), pp. 105-142; and (ii) “Room temperature operation of InxGa1-xSb / InAs type II quantum well infrared photodetectors grown by MOCVD,” by D. H. Wu, Y. Y. Zhang, and M. Razeghi, Applied Physics Letters 112 (2018), pp. 111103-111107. Source gases of silicon include silane, disilane, trichlorosilane, (TCS), dichlorosilane (DCS), monochlorosilane (MCS), methylsilane, and silicon tetrachloride. Source gases of germanium include germane.

[0021]Flowing one or more antimony source gases with one or more silicon source gases, or with a combination of sil...

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Abstract

A process for forming an antimony-doped silicon-containing layer includes: (a) depositing by chemical vapor deposition the antimony-doped silicon-containing layer above a semiconductor structure, using an antimony source gas and a silicon source gas or a combination of the silicon source gas and a germanium source gas; and (b) annealing the antimony-doped silicon-containing layer at a temperature of no greater than 800° C. The antimony source gas may include one or more of: trimethylantimony (TMSb) and triethylantimony (TESb). The silicon source gas comprises one or more of: silane, disilane, trichlorosilane, (TCS), dichlorosilane (DCS), monochlorosilane (MCS), methylsilane, and silicon tetrachloride. The germanium source gas comprises germane.

Description

CROSS REFERENCE TO RELATED APPLICATIONS[0001]The present application relates to and claims priority of U.S. provisional patent application (“Provisional Application”), Ser. No. 62 / 695,334, entitled “Method for in situ Preparation of Antimony-doped Silicon and Silicon Germanium films,” filed on Jul. 9, 2018. The disclosure of the Provisional Application is hereby incorporated by reference in its entirety.BACKGROUND OF THE INVENTION1. Field of the Invention[0002]The present invention relates to semiconductor circuit fabrication. In particular, the present invention relates to in situ formation of antimony-doped silicon or silicon germanium films.2. Discussion of the Related Art[0003]Three-dimensional (3-D) memory cells, such as those used in commercially available NAND memory, make use of doped polycrystalline silicon (polysilicon) films in the transistor, diode, resistor and other devices. It is advantageous to be able to dope the polysilicon films in situ (i.e., concurrently with th...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): H01L21/02H01L27/1157H01L27/11582H01L27/11556H01L27/11524H10B41/27H10B43/27H10B41/35H10B43/20H10B43/35
CPCH01L27/11582H01L27/1157H01L27/11524H01L27/11556H01L21/02532H01L21/0257H01L21/0262H01L29/0684H10B43/35H10B43/20H01L21/02576H10B41/27H10B43/27H10B41/35
Inventor HERNER, SCOTT BRADHARARI, ELI
Owner SUNRISE MEMORY CORP