Production apparatus of monodisperse particle and production process of monodisperse particle and monodisperse particle produced by the process

Abstract

It is the object to provide a production process of monodisperse particle in which monodisperse particle with uniform particle size (particle diameter) can be stably mass-produced, and monodisperse particle produced by this process, and its production apparatus. The supply pipe diameter deltaf is set to be greater than the orifice diameter deltao and the internal and external pressure of the slurry retention part b is controlled, and this allows to facilitate supply of the slurry through the supply pipe (21c), and continuously and efficiently supply the slurry, and then to produce monodisperse particle with uniform particle size (particle diameter).

Description

[0001] 1. Field of the Invention[0002] This invention relates to production process of monodisperse particle for producing monodisperse particle containing particles of substantially uniform particle size, and monodisperse particle, and further its apparatus.[0003] 2. Description of the Related Art[0004] Small particles, that is, small monodisperse particles are now increasing demand in various kinds of science and technology. For example, latex particle which is well known as small monodisperse particle, and produced by sol-gel process, has standard deviation of approximately 10% of average particle diameter in particle size (particle diameter) distribution, and is used as standard size particle in electron microscope observation. In semi-conductor industry, spherical soldering powder of uniform particle size (particle diameter) of 30 .mu.m to 40 .mu.m is required. Further, in HIP forming of alloy powder, spherical powder of uniform particle size (particle diameter) is required to ...

AI Technical Summary

Benefits of technology

[0013] To overcome the above problems, the-applicants considered the industrial application of the above production process and production apparatus of spherical monodisperse particle as well as obtaining the multi-purpose monodisperse particle, and succeeded in finding the fundamental conditions to produce highly multi-purpose monodisperse particle industrially and cheaply. At the same time, the applicants further improved the above production process and production apparatus of spherical monodisperse particle, and reached to the production process of monodisperse particle in which handling, setting and control are easy, and monodisperse particles are suitably mass-produced as well as monodisperse particles in high melting point are possibly produced, and the monodisperse particles produced by this process as well as its production apparatus.

Problems solved by technology

However, in conventional process, classification operation is inevitable, and further it is generally difficult to control the particle size widely, that is, to obtain the monodisperse particle of desired particle size.

Further, in the PREP process, rotational stability of electric poles limits the production of the particle to the diameter of approximately 100 .mu.m.

However, it is not sufficient to determine suitability of the monodisperse particle for various kinds of applications by the only fact that high-accurate spherical monodisperse particles can be produced.

In other words, unless the multi-purpose monodisperse particles suitable for various applications by itself can be definite, it is difficult to produce the monodisperse particle industrially and cheaply.

For this reason, there exists a costly problem for industrial application of the monodisperse particle to various fields.

Where the diameter of the supply pipe is less than 100 .mu.m, it is difficult to supply the flowable material to the retention container for flowable material, and impossible and inconvenient to continuously, stably eject.

On the other hand, where the diameter of the supply pipe exceeds 900 .mu.m, escape of the flowable material to the supply pipe becomes large and displacement of the diaphram or the cylinder rod becomes very large, and then the flow of the flowable material to the orifice becomes unstable, therefore, it becomes difficult to continuously and stably eject, as a result, it is not preferable.

Where the k is less than 0.5, it is difficult to supply the flowable material to the retention container for flowable material, and impossible and inconvenient to continuously, stably eject.

On the other hand, where the K exceeds 0.95, escape of the flowable material to the supply pipe becomes large and displacement of the diaphram or the cylinder rod becomes very large, and then the flow of the flowable material to the orifice becomes unstable, therefore, it becomes difficult to continuously and stably eject, as a result, it is not preferable.

Further, intervention of foam into the material is not allowed, therefore, it is possible to high-efficiently apply energy provided from outside to the flowable material.

On the other hand, when the difference in pressure P between internal pressure of the material container (Pi) and external pressure of the material container (Po) exceeds the limit difference in pressure Pc, the flowable material flows down from the orifice by its weight and then the production control becomes difficult.

In this case, if the standard deviation exceeds 2 .mu.m, it is difficult to laminate other plane body with close contact on the plane body on which the particles in 100 to 300 .mu.m are arranged in plane, two dimensionally, in this sense, it is difficult to apply to the area in which uniformity of the component particle diameter is particularly important, in this point, there are applications in which it can not be applied as monodisperse particle, therefore, it can not be widely used and inconvenient.

In here, if the standard deviation exceeds 5 .mu.m, the flowability lowers and the filling density becomes small as well as variation in the component particles becomes excessive, and become nonuniform as aggregation, as a result, there are applications in which it can not be applied as monodisperse particle, therefore, it can not be widely used and inconvenient.

As a result, there is inconvenience that classification operation is separately required.

Further, if the sphericity exceeds 2.5%, the component particles become irregular, and there are applications in which it can not be applied, therefore, it can not be widely used and inconvenient.

In here, if the standard deviation exceeds 5 .mu.m, variation in the component particles becomes excessive, as a result, there are applications in which it can not be applied as monodisperse particle, therefore, it can not be widely used and inconvenient, and further, if the sphericity exceeds 2.5%, the component particles become irregular, and there are applications in which it can not be applied, therefore, it can not be widely used and inconvenient.

In this case, however, if the slurry by its own weight falls toward the recovery part C, it is difficult to efficiently and continuously produce the ceramics spherical monodisperse particles.

In the above, when the difference in pressure between the internal pressure (Pi) of the slurry retention part b and external pressure (Po) of the slurry retention part b is less than 0, this is a factor to obstruct the supply through the supply pipe 21c, whereas, when the difference in pressure between the internal pressure (Pi) of the slurry retention part b and external pressure (Po) of the slurry retention part exceeds the limit difference in pressure, the slurry flows down from the orifice by its own weight, therefore, it is difficult to control production.

In this state, they are not cooled sufficiently, therefore, condensing and deforming occurs, and then complete shaped metallic glass particle sphere is not obtained, however, it is possible to check the possibility for production conditions.

Whereas, when the difference in pressure between the internal pressure (Pi) of the scrucible 26 and external pressure (Po) of the scrucible 26 exceeds the limit difference in pressure, the material liquid flows down from the orifice by its own weight, therefore, it is difficult to control production.

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