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Electrically programmable memory element with improved contacts

a memory element and contact technology, applied in the direction of digital storage, instruments, semiconductor devices, etc., can solve the problems of inconsequential or at best unsubstantial power saving, relative high energy input required to obtain detectable changes, etc., and achieve the effect of reducing cell area and programming energy

Inactive Publication Date: 2006-05-25
LOWREY TYLER +6
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The solution achieves lower programming energy and smaller cell area, enhancing the memory element's efficiency and power usage, making it suitable for large-scale archival storage and improving operating times in portable devices.

Problems solved by technology

The most significant of these limitations was the relatively high energy input required to obtain detectable changes in the chemical and / or electronic bonding configurations of the chalcogenide material in order to initiate a detectable change in local order.
Such high energy levels translate into high current carrying requirements for the address lines and for the cell isolation / address device associated with each discrete memory element.
However, if the EEPROM replacement for mechanical hard drives has high switching energy requirements (and therefore high power requirements), the power savings may be inconsequential or at best unsubstantial.

Method used

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  • Electrically programmable memory element with improved contacts
  • Electrically programmable memory element with improved contacts
  • Electrically programmable memory element with improved contacts

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Embodiment Construction

[0033]FIG. 1 is a cross-sectional view of a memory device 100 of the present invention formed on a semiconductor substrate 102. The memory device 100 comprises two independent single-cell memory elements. The first single-cell memory element comprises a first contact 130A, memory material layer 250, and second contact 270. The second single-cell memory element comprises first contact 130B, memory material layer 250, and second-contact 270. As shown in the embodiment shown in FIG. 1, two memory elements may share a single continous volume of phase change memory material. The insulative layer 260 provides for electrical isolation between the memory material 250 and the horizontally disposed section of the second contact 270. The insulative layer 260 also provides a thermal blanket keeping heat energy within the memory material layer 250. The dielectric region 140 electrically isolates the first contact 130A from the first contact 130B. The first contacts 130A,B and the second contact ...

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Abstract

A method of making an electrically programmable memory element, comprising: providing a conductive sidewall spacer; and forming a phase-change material in electrical communication with said conductive sidewall spacer.

Description

RELATED APPLICATION INFORMATION [0001] This application is a continuation of U.S. patent application Ser. No. 09 / 276,273, filed Mar. 25, 1999, which is a continuation-in-part of U.S. patent application Ser. No. 08 / 942,000, filed Oct. 1, 1997, now abandoned. U.S. patent application Ser. No. 09 / 276,273 is hereby incorporated by reference herein.FIELD OF THE INVENTION [0002] The present invention relates generally to a uniquely designed solid state, electrically operated memory element. More specifically, the present invention relates to a new structural relationship between the electrical contacts and the memory material which are integral parts of the memory element. BACKGROUND AND PRIOR ART [0003] The Ovonic EEPROM is a proprietary, high performance, non-volatile, thin-film electronic memory device. Its advantages include non-volatile storage of data, potential for high bit density and, consequently, low cost because of its small footprint and simple two-terminal device configuratio...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L21/00G11C11/56H01L27/24H01L45/00
CPCG11C11/56G11C11/5678G11C13/0004H01L45/06H01L45/1233H01L45/122H01L45/144H01L45/16H01L45/1675H01L27/2436H01L27/2472H01L45/126H10B63/30H10B63/82H10N70/231H10N70/821H10N70/826H10N70/8413H10N70/8828H10N70/011H10N70/063
Inventor LOWREY, TYLEROVSHINSKY, STANFORD R.WICKER, GUY C.KLERSY, PATRICK J.PASHMAKOV, BOILCZUBATYJ, WOLODYMYRKOSTYLEV, SERGEY A.
Owner LOWREY TYLER