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Methodology of chemical mechanical nanogrinding for ultra precision finishing of workpieces

a technology of nanogrinding and workpieces, applied in the field of nanogrinding and chemical mechanical nanogrinding of workpieces, can solve the problems of sliding abrasive finishing process critically affecting the magnetic, electrical and mechanical performance, and the stability of recording heads, and achieves smooth surface finish (sub-nm ra), the effect of reducing the loss of magnetic space and reducing the smearing

Inactive Publication Date: 2006-07-13
WESTERN DIGITAL TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This approach results in near-zero PTR, improved surface finish, and minimal smearing across multi-layers, meeting the requirements for high areal density thin film magnetic heads by reducing PTR to about 0.5 nm and providing a virtually scratch-free surface.

Problems solved by technology

The slider abrasive finishing process critically affects the magnetic, electrical, and mechanical performances, as well as the stability of the recording heads.

Method used

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  • Methodology of chemical mechanical nanogrinding for ultra precision finishing of workpieces
  • Methodology of chemical mechanical nanogrinding for ultra precision finishing of workpieces
  • Methodology of chemical mechanical nanogrinding for ultra precision finishing of workpieces

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BACKGROUND OF THE INVENTION

[0001] Technical Field

[0002] The present invention relates in general to an improved ultrafine finish for workpieces having various elements with different hardnesses and, in particular, to an improved system, method, and apparatus for nanogrinding and chemical mechanical nanogrinding of workpieces with both chemical and mechanical processes.

[0003] Description of the Related Art

[0004] Data access and storage systems generally comprise one or more storage devices that store data on magnetic or optical storage media. For example, a magnetic storage device is known as a direct access storage device (DASD) or a hard disk drive (HDD) and includes one or more disks and a disk controller to manage local operations concerning the disks. The hard disks themselves are usually made of aluminum alloy or a mixture of glass and ceramic, and are covered with a magnetic coating. Typically, one to five disks are stacked vertically on a common spindle that is turned by a...

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PUM

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Abstract

Abstract of the DisclosureA chemical-mechanical nanogrinding process achieves near-zero pole tip recession (PTR) to minimize magnetic space loss of the head transducer to media spacing loss, alumina recession trailing edge profile variation, and smooth surface finish with minimal smearing across multi-layers of thin films and the hard substrate to meet the requirements of high areal density head. With a fine chemical mechanical nanogrinding process, PTR can be improved to a mean of about less than 1.0 nm.

Description

Detailed Description of the InventionBACKGROUND OF THE INVENTION[0001] Technical Field[0002] The present invention relates in general to an improved ultrafine finish for workpieces having various elements with different hardnesses and, in particular, to an improved system, method, and apparatus for nanogrinding and chemical mechanical nanogrinding of workpieces with both chemical and mechanical processes.[0003] Description of the Related Art[0004] Data access and storage systems generally comprise one or more storage devices that store data on magnetic or optical storage media. For example, a magnetic storage device is known as a direct access storage device (DASD) or a hard disk drive (HDD) and includes one or more disks and a disk controller to manage local operations concerning the disks. The hard disks themselves are usually made of aluminum alloy or a mixture of glass and ceramic, and are covered with a magnetic coating. Typically, one to five disks are stacked vertically on...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): C03C15/00
CPCC03C15/00C03C19/00G11B5/8404
Inventor GUTHRIE, HUNG-CHINJIANG, MING
Owner WESTERN DIGITAL TECH INC
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