Piezoelectric Actuator, Ink-Jet Head, Method Of Producing Piezoelectric Actuator, And Method Of Producing Ink-Jet Head

a piezoelectric actuator and actuator technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostriction/magnetostriction machines, printing, etc., can solve the problems of inability to achieve sufficient piezoelectric characteristics in some cases, exposed substrate to high-temperature environment during calcination, etc., to reduce thermal load, reduce the effect of degradation of piezoelectric characteristics and simple process

Inactive Publication Date: 2006-11-16
BROTHER KOGYO KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0008] The present invention is made in view of a situation described above, and an object of the present invention is to provide a piezoelectric actuator and an ink-jet head which are capable of suppressing the degradation of

Problems solved by technology

In the above-mentioned method, however, the substrate is exposed to a high-temperature environment du

Method used

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  • Piezoelectric Actuator, Ink-Jet Head, Method Of Producing Piezoelectric Actuator, And Method Of Producing Ink-Jet Head
  • Piezoelectric Actuator, Ink-Jet Head, Method Of Producing Piezoelectric Actuator, And Method Of Producing Ink-Jet Head
  • Piezoelectric Actuator, Ink-Jet Head, Method Of Producing Piezoelectric Actuator, And Method Of Producing Ink-Jet Head

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Embodiment Construction

[0023] An embodiment of the present invention will be described with reference to FIGS. 1 to 3.

[0024]FIG. 1 shows an ink-jet head 10 of this embodiment. The ink-jet head 10 includes a channel unit 11 (corresponding to the ink-channel forming body of the present invention) which has a plurality of pressure chambers 16 accommodating an ink 20 and an actuator plate 1 (corresponding to the piezoelectric actuator of the present invention) which is joined to the channel unit 11 so as to close the pressure chambers 16.

[0025] The channel unit 11 as a whole is in the form of a flat plate in which a nozzle plate 12, a manifold plate 13, a channel plate 14, and a pressure-chamber plate 15 are stacked in layers in sequence, and the channel unit 11 has a construction in which the plates 12, 13, 14, and 15 are joined to one another with an epoxy-based thermosetting adhesive.

[0026] The nozzle plate 12 is formed of a polyimide-based synthetic resin material, and a plurality of holes which are to...

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Abstract

A method for a piezoelectric actuator and an ink-jet head uses, for forming a lower electrode on a vibration plate, metal-nano particles which can start to sinter with a low temperature as a conductive material; and uses, for forming a piezoelectric layer, an aerosol deposition method requiring no calcination step. Accordingly, upon forming the lower electrode and piezoelectric layer, any calcination under severe condition is not needed. In addition, the calcination of the lower electrode can be advanced simultaneously with an annealing step required after forming the piezoelectric layer. Accordingly, the thermal cycle during producing process can be minimized, thereby suppressing the exfoliation of layers and diffusion of material forming vibration plate into the piezoelectric layer due to thermal history, and consequently lower the degradation of piezoelectric characteristics.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a piezoelectric actuator, an ink-jet head, a method of producing the piezoelectric actuator, and a method of producing the ink-jet head. [0003] 2. Description of the Related Art [0004] An example of a piezoelectric actuator used in an ink-jet head or the like is described in Japanese Patent Application Laid-open No. 11-334087. In this piezoelectric actuator, a substrate (vibration plate) is provided such that the substrate closes openings of pressure chambers each of which communicates with a nozzle opening in a channel forming body; and a lower electrode, a piezoelectric layer, and an upper electrode are stacked in layers (laminated) on this substrate. When an electric field is applied between the upper electrode and the lower electrode, the substrate is bent with the deformation of the piezoelectric layer. Due to this, ink in the pressure chambers is pressurized and is discharged f...

Claims

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Application Information

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IPC IPC(8): H01L41/08
CPCB41J2/161B41J2/1623H01L41/0477Y10T29/49155H01L41/314Y10T29/42H01L41/0973H10N30/877H10N30/2047H10N30/074
Inventor YASUI, MOTOHIRO
Owner BROTHER KOGYO KK
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