Multiple probe detection and actuation

Abstract

A method of detecting the positions of a plurality of probes. An input beam is directed into an optical device and transformed into a plurality of output beamlets which are not parallel with each other. Each output beamlet is split into a sensing beamlet and an associated reference beamlet. Each of the sensing beamlets is directed onto an associated one of the probes with an objective lens to generate a reflected beamlet which is combined with its associated reference beamlet to generate an interferogram. Each interferogram is measured to determine the position of an associated one of the probes. A similar method is used to actuate a plurality of probes. A scanning motion is generated between the probes and the sample. An input beam is directed into an optical device and transformed into a plurality of actuation beamlets which are not parallel with each other.

Description

FIELD OF THE INVENTION[0001]The present invention relates to a method of detecting the positions of a plurality of probes, a method of actuating a plurality of probes, and apparatus operable to perform such methods.BACKGROUND OF THE INVENTION[0002]The speed of scanning in a probe microscope can be increased by operating two or more cantilevers in parallel, such that data is acquired simultaneously from each probe. Parallel operation in scanning probe microscopy (SPM) is a challenge because multiple probe detection must be implemented as well as independent actuation systems for each cantilever. As a result, parallel SPM systems have in the past differed significantly from conventional SPM systems. For example, some systems have deployed cantilevers with integrated piezo-resistive sensors, and integrated zinc oxide Z-actuators (Quate et al Applied Physics Letters vol. 67 No 26 3918 (1995)). A major difficulty with such integrated systems is the complexity and corresponding cost of th...

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Benefits of technology

[0032]The probes may be used in a number of applications, including (but not limited to): scanning probe microscopy, for example for extreme ultraviolet (EUV) mask inspection and review; biosensing to detect multiple biomarkers; nanolithography, such as dip pen nanolithography in wh

Problems solved by technology

Parallel operation in scanning probe microscopy (SPM) is a challenge because multiple probe detection must be implemented as well as independent actuation systems for each cantilever.

A major difficulty with such integrated systems is the complexity and corresponding cost of the sensors.

The designs are also inflexible since changing a simple parameter such as the pitch or spring constant of the cantilevers also requires a redesign of the layout and costly fabrication.

As a result, parallel SPM systems of this sort have not been widely used.

However, such piezo-elements often have a limited speed of response due to their size and mechanical characteristics.

Smaller elements which can be integrated into the cantilever can be employed for fast scanning applications but the required fabrication and electrical connection is a challenge.

However this approach has not been used for parallel probe control due to the increased number of optical components needed for alignment and focusing.

Conventional scanning probe microscopes typically rely on optical lever detection for sensing cantilever motion but these systems are impractical to operate with multiple

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