Glow discharge optical emission spectrometer and glow discharge optical emission spectrometry

Abstract

The invention provides a glow discharge optical emission spectrometer for intermittently applying a high frequency voltage to a sample and obtaining a measured value from a spectroscope in synchronization with a timing of a unit of application during intermittent application. The obtaining of measured values in which is introduced noise at a non-application time during intermittent application is prevented, and by applying a high voltage value to the sample with a minimized adverse effect on a voltage application to the sample, high-level measured values are obtained. By obtaining a measured value a plural number of times during a unit of application, a large number of measured values are obtained in a short period of time, resulting in a reduction in measurement time.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This Nonprovisional application claims priority under 35 U.S.C. §119(a) on Patent Application No. 2004-266048 filed in Japan on Sep. 13, 2004, the entire contents of which are hereby incorporated by reference.BACKGROUND OF THE INVENTION[0002]The present invention relates to a glow discharge optical emission spectrometer with which high-level and highly-accurate measured values can be obtained in a short period of time by performing an intermittent application in which an application of a high frequency voltage and a non-application are intermittently switched, and obtaining a measured value at a timing in synchronization with an application timing, and a glow discharge optical emission spectrometry.[0003]Conventionally, there exists a glow discharge optical emission spectrometer which causes light emission from a glow discharge by applying a high frequency voltage to a sample, splits the light emission by wavelength with a spectroscope an...

AI Technical Summary

Benefits of technology

This approach enables the acquisition of high-level, accurate measurement results in a shorter time frame with reduced material attrition and improved data clarity, allowing for precise analysis of metallic materials.

Problems solved by technology

The conventional glow discharge optical emission spectrometer presents a problem in that it is difficult to obtain good measurement results in the case of performing a quantitative analysis (bulk analysis) on a metallic material, i.e., in the case of performing a measurement to determine what elements and what concentrations of those elements are contained in various metallic materials such as steel and aluminum.

In measuring a metallic material, generally, a continuous voltage application is performed for a long period of time, and therefore, sputtering also continues for a long period of time.

Furthermore, since sputtering causes attrition of the surface of the metallic material, as the application time elapses, the distance from the surface of the metallic material to the electrode increases due to the influence of sputtering.

As a result, the conditions under which sputtering occurs are changed, and accordingly, light emission becomes unstable, and by the increase of the distance between the metallic material and the electrode the measured intensity of the metallic material gradually reduces (see FIG. 1).

Consequently, it becomes difficult to obtain stable measurement results, and an inexperienced measurer or the like may be mislead to believe that the measured value is changed.

However, by increasing the voltage value, sputtering caused between the metallic material and the electrode increases, and accordingly, attrition of the metallic material caused by sputtering progresses in a short period of time, which in turn accelerates the time when the measurement becomes unstable.

Accordingly, in the conventional glow discharge optical emission spectrometer, the measurement needs to be performed at low voltage values so as to diminish the degree of attrition caused by sputtering, and thus, there is a problem in that good measurement results cannot be obtained in a short period of time.

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