Semiconductor encapsulation structure possessing support part, and preparation method
A packaging structure, semiconductor technology, applied in the direction of semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device parts, etc., can solve problems such as poor control of connection distance, excessive solder volume, short circuit of solder materials, etc., to avoid Effect of too low height of conductive adhesive material
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Embodiment 2
[0037] Figure 5A to Figure 5D A schematic cross-sectional view of Embodiment 2 of the method for manufacturing a semiconductor package structure with a support portion according to the present invention is shown. Similar to the above-mentioned manufacturing method, embodiment 2 is mainly to form the concave portion on the surface of the carrier before the electroplating process.
[0038] like Figure 5A As shown, firstly, a metal carrier 40 is provided, and a concave portion 43 is formed on the surface of the carrier 40 at a position where the circuit layout is not affected.
[0039] like Figure 5B As shown, a resist layer 41 is covered on the carrier, and the resist layer 41 covers the recess 43, and a plurality of openings are formed through a patterning process, so as to expose part of the carrier 40; then, an electroplating process is performed, The electroplating current is conducted through the metal carrier 40 , so as to form a plurality of electrical contacts 421 a...
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