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Resonator of microelectronic mechanical system and its production method

A technology of micro-electronic machinery and resonators, applied in the direction of electrical components, impedance networks, etc., can solve the problems of high quality factor, difficulty in miniaturization, and large volume, and achieve high quality factor, easy integration, and small volume.

Inactive Publication Date: 2009-02-18
阎济泽
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a crystal resonator and a surface wave acoustic resonator with a small volume, low energy consumption, high quality factor MEMS resonator with high performance, easy integration, low noise, small temperature drift, high stability, low cost, large output and easy industrialization and its manufacturing method

Method used

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  • Resonator of microelectronic mechanical system and its production method
  • Resonator of microelectronic mechanical system and its production method

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Embodiment Construction

[0017] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0018] The hardware of the invention consists of a substrate, a resonant structure for mechanical vibration, an anchoring device for fixing the resonant structure, capacitive output and input electrodes. Its connection structure is attached figure 1 : The resonant structure for mechanical vibration is fixed on the substrate by an anchor device, the input electrode is connected to the resonant structure by a variable parallel plate capacitor, and the output electrode is connected to the resonant structure by a variable parallel plate capacitor.

[0019] The specific connection example is attached figure 2 : In the resonator and related circuit IC, the 8 pins of IC1 are connected with the 12 pins of IC2, the 3 pins of IC1 are connected with the 14 pins of IC2, the 5 pins of IC1 are connected with the 15 pins of IC2, the 13 pins of IC2 are connected wi...

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Abstract

The resonator thereof comprises a substrate, a resonance structure, an anchorage device for securing the resonance structure, an electrode and an output electrode. The resonance structure is secured in the substrate using the anchorage device; the input electrode is connected to the resonance structure using a variable parallel plate capacitor; the output electrode is connected to the resonance structure using a variable parallel plate capacitor. The substrate and the resonance structure are made of one kind of material from silicon, germanium, carbide and piezoelectric ceramic. The resonator can be integrated with one kind of component from micro-electronic chip, bipolar transistor, MOS component, CMOS component, MOSFET, JFET and IGFET.

Description

technical field [0001] The invention relates to a resonator device based on MEMS technology and a manufacturing method thereof in the field of wireless communication, in particular to a MEMS resonator and a manufacturing method thereof. Background technique [0002] Communication science is the cornerstone of the high-tech information society and the core of the high-tech information industry. Wireless communication is one of the most important methods to realize communication science. The quality and performance of the communication system are directly determined by the quality of the wireless communication technology. A wireless communication system is mainly composed of an input modulator, a sending device, a receiving device, an output demodulator, and a channel. The reliability and effectiveness of its information communication mainly depend on the accuracy, phase noise, and system stability of the system's frequency oscillator. The input modulator, transmitter, receiv...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/02H03H9/15
Inventor 阎济泽曾屹
Owner 阎济泽
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