Method of reducing serial resistance between inductance in chip and antenna in chip
An on-chip inductor and on-chip antenna technology, applied in the field of microelectronics, can solve problems such as reducing the effect of suppressing the current crowding effect of multi-strand lines, and inability to distribute current.
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[0026] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0027] figure 1 An example of the standard CMOS layer relationship of metal interconnect inductors; different metal layers can be connected through vias to realize a parallel or series structure of inductor coils. Let's take this process as an example to design a method to reduce the crowding effect of inductor current by designing multiple current paths
[0028] figure 2 It is a hollow single-ended planar spiral inductor designed by a conventional method. It has 3 turns, and the metal 20 of each turn is a separate one. The metal ④ and the metal ③ are connected in parallel by a large number of through holes 22 . The ports of the inner ring are connected through the second layer of metal 21 .
[0029] (1) Tight spiral winding method
[0030] image 3 It is a schematic diagram of single-coil helical winding with 8 strands. A metal wire divided into mult...
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