Force control method for lap surface control of stressed lap and equipment thereof
A control method and polishing disk technology, applied in force control of active polishing disk surface shape control, active polishing disk field, can solve the problems of large volume, slow dynamic response, high equipment cost, etc., achieve simplified circuit structure, simplified mechanical structure, and improved The effect of response speed
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[0063] For the mechanical structure of the force actuator controller, refer to Figure 5 : the main shaft of the control motor 1 is connected with a screw rod respectively, the nut on the screw rod is connected with the steel wire rope 4 through the lever 3, and the steel wire rope 4 is fixedly connected with the fixed point on the back side of the active polishing disc; the structure of the described force actuator controller is: each One end of the wire rope is respectively provided with tension sensors 5 . Among the figure, 2 is a motor seat, and 6 is a regulator.
[0064] The specific details of the force actuator hardware are: the single-chip microcomputer selects the P89LPC938 of PHILPS Company, which adopts a high-performance processor structure, and the instruction execution time only needs 2 to 4 clock cycles, which is 6 times that of the standard 80C51 device; and integrates 8 A 10-bit A / D converter and a PWM port are provided, so that no additional A / D chip is need...
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