Cleaning apparatus

A cleaning device and cleaning liquid technology, which are applied in the directions of cleaning flexible articles, cleaning methods and utensils, cleaning methods using liquids, etc., can solve problems such as inability to use semiconductor process lithography technology, etc., and achieve suppression of precision reduction and environmental pollution. , to avoid the effect of increasing costs
CN100567553CActive Publication Date: 2009-12-09SANYO ELECTRIC CO LTD +2
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
SANYO ELECTRIC CO LTD
Publication Date
2009-12-09

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Abstract

A cleaning device capable of removing organic materials adhering to a mask made of a metal thin film. The cleaning device of the present invention has: the first and the second cleaning tanks (21, 22) for cleaning the mask (10) by a predetermined cleaning solution; Distiller (30); the first cooler (31) that cools the cleaning solution of vacuum distillation to room temperature; the cleaning solution cooled by the first cooler (31) is returned to the first cleaning tank (22) Return pipe (101); the first and second washing tanks (51, 52) for washing the mask (10) with a predetermined washing liquid; distilling the washing liquid of the washing tanks (51, 52) under normal pressure Atmospheric distiller (60); the 2nd cooler (61) that the rinsing liquid of atmospheric distillation is cooled to room temperature; Make the rinsing liquid cooled by the 2nd cooler (61) return to the 2nd rinsing tank (52 ) of the second return pipe (102).
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Description

technical field

[0001] The present invention relates to a cleaning device, and more particularly to a cleaning device for removing organic material adhering to a mask made of a metal thin film in a vapor deposition step of an organic material for organic EL. Background technique

[0002] In recent years, organic EL display devices using organic electroluminescent (Electro Luminescence: hereinafter referred to as "organic EL") components have replaced CRT and LCD display devices and have been attracting attention. An organic EL display device of a thin film transistor (Thin Film Transistor: hereinafter referred to as "TFT") of an EL device.

[0003] The organic EL components are sequentially stacked to form: the anode formed by transparent electrodes such as ITO (Indium Tin Oxide) and the like; the anode formed by MTDATA (4,4-bis(3-methylphenylaniline) A hole-transporting layer composed of a first hole-transporting layer such as TPD (4,4,4-tris(3-methylphenylanilino)tripheny...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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