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Method for preparing (TiAlZr)N ultra-hard coating by employing multiple arc ion plating

A technology of multi-arc ion plating and hard coating, which is applied in the preparation of N super-hard reactive coatings and multi-arc ion-plating multi-component alloy super-hard reactive coatings, can solve the problem of low hardness index and difficulty in ensuring stability problems such as stability and repeatability, large fluctuation range, etc., to achieve the effect of improved adhesion, good stability and repeatability, and guaranteed repeatability

Inactive Publication Date: 2010-01-27
SHENYANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Usually, the hardness of (Ti, Al, Zr)N coating obtained by single-element target multi-target sharing method can be between HV1600-2600, which not only has a low hardness index, but also has a large fluctuation range, making it difficult to ensure stability and repeatability

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Preparation of (TiAlZr)N superhard coating on W18Cr4V high speed steel. Its preparation method is:

[0021] 1. Determine the deposition technology: determine the preparation technology of multi-arc ion plating as (TiAlZr)N superhard coating.

[0022] 2. Design of target material composition: Ti, Al, Zr three-component alloy is used as the cathode target material. In the alloy composition, Al is 10% by weight, Zr is 30% by weight, and Ti is 60% by weight.

[0023] 3. Preparation of alloy target: three times of vacuum smelting with titanium sponge with a purity of 99.99%, aluminum with a purity of 99.99%, and a titanium-zirconium master alloy with a purity of 99.99% to obtain alloy ingots, and then according to the multi-arc ion plating equipment The required target size is processed into a cathode target.

[0024] 4. Selection and pre-treatment of the workpiece: W18Cr4V high-speed steel material is used to make a disc with a thickness of 5mm and a diameter of 30mm as ...

Embodiment 2

[0033] Preparation of (TiAlZr)N superhard coating on W18Cr4V high speed steel. Its preparation method is:

[0034] 1. Determine the deposition technology: determine the preparation technology of multi-arc ion plating as (TiAlZr)N superhard coating.

[0035] 2. Design of target material composition: Ti, Al, Zr three-component alloy is used as the cathode target material. In the alloy composition, Al is 20% by weight, Zr is 10% by weight, and Ti is 70% by weight.

[0036]3. Preparation of alloy target: three times of vacuum smelting with titanium sponge with a purity of 99.99%, aluminum with a purity of 99.99%, and a titanium-zirconium master alloy with a purity of 99.99% to obtain alloy ingots, and then according to the multi-arc ion plating equipment The required target size is processed into a cathode target.

[0037] 4. Selection and pre-treatment of the workpiece: W18Cr4V high-speed steel material is used to make a disc with a thickness of 5mm and a diameter of 30mm as t...

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Abstract

A method for preparing (TiAlZr)N superhard coating by multi-arc ion plating technique sequentially comprises (1) determination of sedimentation technique; (2) determination of target component; (3) preparation of an alloy target; (4) selection and pre-treatment of a workpiece (substrate); (5) acquisition of a transition layer; (6) determination of the number of electric arc sources; (7) heating the workpiece; (8) determination of sedimentation process; (9) baking the film-coated workpiece; (10) workpiece rotation, etc. The invention can form a TiAlZr alloy target and determine the content change ranges of Ti, Al and Zr in the TiAlZr alloy target, so that the TiAlZr)N superhard coating has the advantages of strong adhesion (not less than 180 N), high hardness (not less than HV3,000), etc.

Description

Technical field: [0001] The invention relates to a method for preparing a multi-component superhard reactive coating, in particular to a method for preparing a multi-component alloy superhard reactive coating by multi-arc ion plating, such as a (TiAlZr)N superhard reactive coating. Background technique: [0002] Multi-arc ion plating is a vacuum physical deposition technology with multiple cathode arc evaporation sources that can be evaporated at the same time. The preparation aspect obtains the successful application. (Ti, Al) N, (Ti, Zr) N, (Ti, Cr) N and other superhard composite coatings are more developed and applied than TiN coatings due to their respective characteristics such as high hardness, small friction coefficient, and strong heat resistance. prospect. Research and development of multi-component superhard reactive coatings in order to further improve the comprehensive performance of coatings has become a hot spot in this field. At present, the main difficult...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/14C23C14/24C23C14/58
Inventor 张钧张利鹏郭强李丽王春莉董世柱
Owner SHENYANG UNIV
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