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Microelectronic mechanical variable bandpass filter and process for producing the same

A micro-electro-mechanical and filter technology, which is applied in the field of micro-electro-mechanical systems, can solve problems such as limiting the range of use, and achieve the effects of increasing practicability, large adjustable range, and low loss

Inactive Publication Date: 2010-02-03
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional LC bandpass filter has only one center frequency point, which can only be applied in a single circuit, which limits their application range, so the adjustable LC bandpass filter with multiple center frequency points has a strong application value

Method used

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  • Microelectronic mechanical variable bandpass filter and process for producing the same
  • Microelectronic mechanical variable bandpass filter and process for producing the same
  • Microelectronic mechanical variable bandpass filter and process for producing the same

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Embodiment Construction

[0028] The steps for implementing the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] The MEMS tunable band-pass filter proposed by the present invention includes a set of MEMS capacitive series switches k1~kn and planar inductor L. The schematic diagram of the whole system is as follows figure 1 shown. The schematic diagrams of the planar inductor and the MEMS capacitive series switch are shown in figure 2 , image 3 shown. By controlling the on-off of the MEMS switch connected in parallel with the inductance, the capacitance value connected to the filter network can be adjusted to adjust the center frequency point of the filter. The process for realizing the microelectromechanical tunable bandpass filter is compatible with the traditional MMIC process.

[0030] like figure 2 The shown planar inductor uses gallium arsenide as the substrate 1, including transmission lines 2-1, 2-2, inductance coil 3, and conne...

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Abstract

The invention discloses a micro-electronic mechanical tunable band pass filter that consists of a group of micro-electronic mechanical capacitance serial switch and an planar inductor(L), the amount of the capacitance that is connected to the wave filter capacitance is regulated by the on and off of the micro-electronic capacitance serial switch(kn) so as to regulate the central frequency point ofthe wave filter. The planar inductor(L) applies the GaAs liner(1) as the liner, the two sides of the upper surface of the GaAs liner are provided with a transmission line, the inductive choke(3) is connected with the transmission line through a connecting support pole and is suspended at the silicon nitride media layer(9-0) and the transmission line(2-2); the micro-electric capacitance type serial switch applies the GaAs liner as the liner, the upper surface of the GaAs liner is provided with transmission line(5) and a pull down electrode(8). One part of the transmission line and the pulldownelectrode are provided with a layer of SiN media layer(9), an anchor area(6) that is connected with one end of the switch gird(7) is arranged on the transmission line so as to suspend the switch girdabove the SiN media layer.

Description

technical field [0001] The invention can be used in frequency selection circuits in radio frequency / microwave circuits, in particular a micro-electro-mechanical adjustable band-pass filter and a preparation method thereof, which belong to the technical field of micro-electro-mechanical systems. Background technique [0002] At present, multi-frequency work is becoming more and more common in radar, communication and other fields, and the requirements for frequency separation are also increased accordingly. Band-pass filters are more and more widely used in radio frequency / microwave circuits. The traditional LC bandpass filter has only one center frequency point, which can only be applied in a single circuit, which limits their application range, so the adjustable LC bandpass filter with multiple center frequency points has a strong application value. Micro-electro-mechanical systems (MEMS) ultra-fine micro-fabrication technology is an effective way to realize adjustable ban...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H7/01H03H3/00B81C1/00
Inventor 廖小平武锐
Owner SOUTHEAST UNIV
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