Pressure reduction vessel and pressure reduction processing apparatus
A container and internal decompression technology, applied in pressure vessels/vacuum vessels, pressure vessels used in chemical processes, instruments, etc., can solve problems such as difficulty in high-precision machining, increase in the number of manufacturing processes for decompression vessels, and particle generation.
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[0058] Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.
[0059] 1 is a perspective view showing the appearance of a vacuum processing apparatus according to an embodiment of the present invention, FIG. 2 is a horizontal sectional view of the vacuum processing apparatus of FIG. 1 , FIG. 3 is a longitudinal sectional view of a vacuum preparation chamber of the vacuum processing apparatus, and FIG. 4 It is a perspective view showing a configuration example of a substrate transfer mechanism of a substrate transfer device arranged in a vacuum processing chamber.
[0060] The vacuum processing apparatus 100 of this embodiment includes: a vacuum processing chamber 10 for performing desired vacuum processing such as plasma etching processing and thin film forming processing on a substrate G such as an LCD glass substrate under a vacuum atmosphere; , the load lock chamber 20 functioning as a vacuum preparation chamber; th...
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