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Dispensing system for alkali metals capable of releasing a high quantity of metals

A distribution system, alkali metal technology, applied in the direction of distribution device, special distribution device, metal material coating process, etc., can solve the problems of increasing the temperature of quartz crystal, losing the precision of processing control, and the interference of deposit thickness measurement.

Active Publication Date: 2007-11-07
SAES GETTERS SPA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Large alkali metal distributors are also able to heat the quartz crystal by radiation by releasing a large amount of heat, thus increasing the temperature of the quartz crystal; since the frequency of vibration also depends on the latter parameter, there will be disturbances in the measurement of the thickness of the deposit, and thus loss of processing control precision

Method used

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  • Dispensing system for alkali metals capable of releasing a high quantity of metals
  • Dispensing system for alkali metals capable of releasing a high quantity of metals

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Embodiment Construction

[0016] The containers of the present invention may have any shape. For example, the container may have an elongated shape with a trapezoidal cross-section (this shape is also known in the art as a "boat"), with extensions at the ends specifically for connecting electrical terminals for heating; containers of this type For example, it has been described in the applicant's patent US6753648. In this case, the shield surrounds at least the larger surface of the container, possibly with openings corresponding to said extensions at the ends of the container; the shield is shaped such that at least between the first and second openings In the area, the distance between the container and the shielding body is as small as possible, which is compatible with the requirements of easy manufacturing, emptying the formed space and avoiding contact between the container and the shielding body caused by thermal deformation, which is described below will be discussed in detail.

[0017] One o...

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Abstract

A dispensing system for alkali metals (10), that allows to increase the quantity of alkali metal that can be dispensed, as well as the time during which the system can be used with properties of metal vapors release which are constant in time, comprising an alkali metal dispenser, comprised of a metallic container (11) with one or more first openings (13), containing a mixture (15) of one or more alkali metal compounds and one ore more reducing compounds, preferably in form of loose powders or of pellets of said powders. The system further comprises a metallic shield (12) which substantially encloses said container and that has one or more second openings (14) facing said first openings.

Description

technical field [0001] The present invention relates to alkali metal dispensing systems capable of releasing large amounts of alkali metal. Background technique [0002] Alkali metals have long been used in electronics. In particular, these metals have been used in the past, for example, for the manufacture of photosensitive surfaces of image amplifiers or photomultiplier tubes, which are obtained by condensation of metal vapors on the inner walls of these devices. [0003] Due to the high reactivity of alkali metals with ambient gases and moisture, the evaporation source usually used in industry is not pure metals, but compounds of alkali metals that are stable in air at room temperature and mixed with reducing agents. The most commonly used compound of this alkali metal is the chromate M 2 CrO 4 , also using the molybdate M 2 MoO 4 , Tungstate M 2 WO 4 , Niobate MNbO 4 , tantalate MTaO 3 , titanate M 2 TiO 3 etc. salts (M in these formulas represents any alkali ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/12C23C14/24B67D7/80
CPCH01L51/56C23C14/243H01J9/12H01L51/5052C23C14/14C23C14/26H10K71/00
Inventor R·詹南托尼奥L·卡塔尼奥A·伯纳希
Owner SAES GETTERS SPA
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