Superfine electroform technique of supercutical fluid, and equipment

A supercritical fluid and micro-technology, applied in the field of electrochemistry, can solve problems such as uneven deposition of microstructure parts, surface area tumors, etc., achieve uniform electric field distribution, and improve the effect of deposition conditions

Inactive Publication Date: 2007-12-26
HAIAN GASOLINEEUM SCI RES INSTR +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007]An object of the present invention is to provide a method that can precisely deposit a flat surface and a smooth Supercritical fluid micro-electroforming process for dense microstructure parts

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  • Superfine electroform technique of supercutical fluid, and equipment
  • Superfine electroform technique of supercutical fluid, and equipment

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Embodiment Construction

[0020] The supercritical fluid micro-electroforming device of the present invention is shown in FIG. 1 . The device includes CO 2 Gas cylinder 1 , high pressure pump 3 , DC power supply 5 , control unit 6 , fine deposition unit 9 , constant temperature bath 10 , magnetic stirrer 11 and recovery device 12 . Wherein the fine deposition unit 9 is as shown in Figure 2, and it comprises a reactor 9-7 and lining 9-6 thereof, and this reactor 9-7 can adopt stainless steel or high-strength structural steel to process, and reactor lining 9 -6 is a corrosion-resistant tetrafluoroethylene material. The fine deposition unit 9 also includes an air inlet 9-1 and a liquid outlet 9-2, a cathode 9-3 and an anode 9-4, the cathode 9-3 is integrated with the photolithography template, and the anode is a metal plate, and is connected with the metal solution The metal contained is the same, which can be pure copper plate or pure nickel plate, which not only plays the role of conductivity, but als...

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Abstract

This invention discloses process and apparatus for micro electroforming by using supercritical fluid. The process comprises: (1) generating supercritical fluid electroforming solution in the reactor of a fine deposition unit; (2) controlling the power source by a control unit, selecting appropriate electric parameters, and depositing metal ions onto the photoresist patterns of the cathode of the fine deposition unit; (3) removing residual photoresist to obtain fine component. The apparatus comprises a CO2 steel bottle, a high-pressure pump, a DC power source, a control unit, a fine deposition unit, a magnetic stirrer, a thermostatic bath, a backpressure valve and a recovery device. The method and apparatus in this invention can deposit compact, smooth and clear fine component, and the waste supercritical fluid electroforming solution can be recovered and recycled.

Description

technical field [0001] The invention belongs to the field of electrochemistry, and in particular relates to a supercritical fluid micro-electroforming process and a device thereof. Background technique [0002] The micro-electroforming process is a precision special processing method that uses the principle of electrodeposition of metal ions on the surface of the cathode to form parts. It has been widely used in the manufacture of complex precision and special-shaped parts, especially in the field of micro-machine manufacturing. Such as LIGA technology (the abbreviation of Lithographie, Galvanoformung and Abformung in German, meaning lithography, electroforming and injection molding), it is one of the most important means of manufacturing micro-machines. In MEMS (abbreviation of Microelectromechanical Systems in English) technology occupies a very important position. Using LIGA technology, a variety of micro-machines have been successfully prepared, such as micro-motors, mi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D1/00
Inventor 雷卫宁李仁兴于赟王江涛
Owner HAIAN GASOLINEEUM SCI RES INSTR
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