Gas supply-discharge system for base plate sintering furnace

Abstract

The invention provides an air intake and exhaust system for the substrate baking furnace which has a high energy conversion efficiency and a long time reliable operation. The heat discharge gas discharged from the vent of the furnace passes through fans and is fed to the circulation path as a hot-air flow. Then the flow is heated by a heater and purified by a heat resistant HEPA filter and fed to the inner space of the furnace again from a spraying port. In the circulation process, a part of the heat wind heated by the heater flows into the vent-pipe and passes through the catalyst unit. The discharge gas flows into a heat exchanger after most organic matters in the discharge gas are decomposed, because the high temperature discharge gas heated again passes through the catalyst unit. The heated feeding gas whose temperature is boosted by a heat exchange in the heat exchanger with the discharge gas are fed to the circulation path.

Description

technical field [0001] The present invention relates to an air supply and exhaust system in a substrate sintering furnace for controlling glass substrates for liquid crystal display devices, glass substrates for PDP (plasma display panels), or substrates for thin-plate electronic components such as semiconductor wafers ( Hereinafter simply referred to as "substrate") is subjected to sintering treatment. Background technique [0002] One of the manufacturing steps of the color filter includes a step of sintering the glass substrate on which the color ink is sprayed by inkjet. This sintering step is carried out by maintaining the substrate in an air atmosphere for a predetermined time in a sintering furnace whose temperature has been raised to a predetermined sintering temperature. In addition, in the case of forming metal wiring on a glass substrate, the glass substrate is sintered in an inert gas atmosphere such as nitrogen in the same sintering furnace. Regardless of the ...

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Problems solved by technology

[0007] However, even if the gas discharged from the sintering furnace is catalytically treated, the organic matter on the glass substrate cannot be sufficiently removed. As a result, the heat exchanger is clogged with deposits in a short period of time, and continuous operation cannot be continued for a long time. Therefore, The operating efficiency of the device is very low, which is very uneconomical

[0008] Therefore, in fact, although the gas discharged from the sintering furnace is mostly treated by waste gas treatment equipment, in this case, in addition to meeting the above-mentioned low energy conversion efficiency, it is also necessary to treat the waste liquid after treatment. , so there is a problem of increased operating costs

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