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Fe/Mo nano multilayer film and preparation method thereof

A nano-multi-layer and preparation process technology, which is applied in coating, metal material coating process, ion implantation plating, etc., can solve the problem that the hard metal nano-multi-layer film is not easy to prepare, not suitable for anti-friction applications of machinery and equipment, and has no Rising tribology application research and other issues, to achieve the effect of reliable performance, excellent mechanical properties, and excellent wear resistance

Active Publication Date: 2008-02-20
王海斗 +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the survey found that the highest hardness of the existing Au / Ni, Cu / Fe, Cu / Ni, Cu / Nb nano-multilayer films at the optimal modulation wavelength is only 3.5GPa, and the average hardness is only 2.2GPa
Due to reasons such as hard metal nano-multilayer films are not easy to prepare, it has not been found that there is a metal / metal nano-multilayer film in which hard metals (such as molybdenum Mo, tantalum Ta, etc.) have been developed as constituent metals in this area.
[0005] So far, the above-mentioned research on metal / metal nano-multilayer films has great limitations, which are only in the detection of physical properties, and have not risen to the application research of tribology.
And the above nano-multilayer films such as Au / Ni, Cu / Fe, Cu / Ni, Cu / Nb still have defects in hardness, elastic modulus and degree of bonding with metals, so they are not suitable for anti-friction applications in machinery and equipment. , especially precision instruments

Method used

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  • Fe/Mo nano multilayer film and preparation method thereof
  • Fe/Mo nano multilayer film and preparation method thereof
  • Fe/Mo nano multilayer film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Mo target and Fe target are respectively placed at the two target source positions;

[0033] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0034] The substrate is heated to: 50℃ before coating;

[0035] The working gas is: 99.999% high-purity Ar gas;

[0036] Vacuum degree: 2×10 -4 Pa;

[0037] Working air pressure: 2×10 -2 Pa;

[0038] Negative bias is applied to improve deposition efficiency: 50V;

[0039] Setting voltage: 500V, current 100mA, self-bias 450V, sputtering power 100W;

[0040] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is 9.37 seconds, and the deposition rate is 16 nm / min;

[0041] When depositing the Fe layer, the matrix stays in front of the Fe target for 10 seconds, and the deposition rate is 15 nm / min;

[0042] The thickness of the final Fe / Mo nano-multilayer film bilayer is 5 nm.

Embodiment 2

[0044] Mo target and Fe target are respectively placed at the two target source positions;

[0045] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0046] The substrate is heated to: 100℃ before coating;

[0047] The working gas is: 99.999% high-purity Ar gas;

[0048] Vacuum degree: 1×10 -2 Pa;

[0049] Working air pressure: 5×10 -1 Pa;

[0050] Negative bias is applied to improve deposition efficiency: 120V;

[0051] Setting voltage: 800V, current 220mA, self-bias 750V, sputtering power 200W;

[0052] When depositing the Mo layer, the substrate stays in front of the Mo target for 25 seconds, and the deposition rate is 12 nm / min;

[0053] When depositing the Fe layer, the matrix stays in front of the Fe target for 40 seconds, and the deposition rate is 7.5 nm / min;

[0054] The thickness of the final Fe / Mo nano-multilayer film bilayer is 10 nm.

Embodiment 3

[0056] Mo target and Fe target are respectively placed at the two target source positions;

[0057] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0058] The substrate is heated to: 150℃ before coating;

[0059] The working gas is: 99.999% high-purity Ar gas;

[0060] Vacuum degree: 2×10 -2 Pa;

[0061] Working air pressure: 2×10 0 Pa;

[0062] Negative bias is applied to improve deposition efficiency: 200V;

[0063] Setting voltage: 1000V, current 400mA, self-bias 950V, sputtering power 300W;

[0064] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is: 100 seconds, and the deposition rate is 6 nm / min;

[0065] When depositing the Fe layer, the matrix stays in front of the Fe target for 100 seconds, and the deposition rate is 6 nm / min;

[0066] The thickness of the final Fe / Mo nano-multilayer film bilayer is 20 nm.

[0067] After testing, the mechanical property parameters of the Fe / Mo...

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Abstract

The invention discloses a Fe / Mo nano multilayer film, making of Fe layer and Mo layer depositing of the base body. The thickness contrast of the Fe layer and the Mo layer is 0.95 to 1.05, the thickness of the double sublayer is 5 to 20nm, and the total thickness of the nano multilayer film is 1 to 3Mum. The nano multilayer film has great dynam performance and high rigidity, and the combination intensity of the film and the base body is high with great abrasion-resisting property. The Fe / Mo nano multilayer film of the invention has high rigidity and super-stiffness; therefore, the invention is applied to improve the abrasion resistance of friction surface, commonly being applicable in the mechanical device; the abrasion resistance of the invention is particularly great in the friction proof of precision instrument.

Description

technical field [0001] The invention relates to a nanometer multilayer film, in particular to a Fe / Mo nanometer multilayer film prepared by sputtering technology. Background technique [0002] By preventing the direct contact between the friction pairs, the solid lubricating film can effectively avoid the adhesive wear and strain fatigue of the friction pairs, and thus can significantly improve the tribological properties of the friction pair materials. At present, sulfide solid lubricating materials with layered structure and low shear strength characteristics are the most widely used solid lubricating film types on the surface of friction pairs in mechanical equipment, and play a great role in improving the lubrication state of friction pairs, such as Ferrous Sulfide (FeS), Molybdenum Disulfide (MoS) 2 )Wait. However, the hardness and elastic modulus of the elemental Fe film and the elemental Mo film can no longer meet the standards required by existing technical equipme...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/14C23C14/54
Inventor 王海斗刘家浚徐滨士
Owner 王海斗
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