Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Flash memory device with single-poly structure and method for manufacturing the same

A technology of flash memory device and polycrystalline structure, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., and can solve problems such as unit size reduction, large area, complex unit structure, etc.

Inactive Publication Date: 2008-03-12
DONGBU HITEK CO LTD
View PDF1 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Also, since the control gates, NMOS and PMOS read transistors, channels or carrier injection regions, etc. are formed in parallel to the substrate surface, there is a limit to cell size reduction
[0009] As a result, the above-mentioned conventional split-gate devices occupy a large area and require electric lines for the respective regions, resulting in a very complex cell structure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Flash memory device with single-poly structure and method for manufacturing the same
  • Flash memory device with single-poly structure and method for manufacturing the same
  • Flash memory device with single-poly structure and method for manufacturing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0020] Embodiments of the present invention will now be described in detail with reference to the embodiments depicted in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.

[0021] Next, a flash memory device having a single-poly crystal structure and a method of manufacturing the same according to a preferred embodiment of the present invention will be described with reference to FIGS. 2A to 2H.

[0022] First, as shown in FIG. 2A , an oxide layer 110 is formed on a semiconductor substrate 100 , and dopants are implanted into the semiconductor substrate 100 to form an HP well or an HN well region 120 .

[0023] Then, to form shallow trench isolation (STI) as shown in FIG. 2B , a photoresist 130 is disposed over regions of the oxide layer 110 other than regions for forming a device insulating layer (not shown). When the oxide layer 110 is etched using the photoresist 130 as an etch...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A flash memory device has a single-poly structure. A method for manufacturing the flash device includes forming an oxide layer over a semiconductor substrate having a P-well region or N-well region. A shallow trench isolation (STI) may be formed in the semiconductor substrate and the oxide layer. A drift region may be formed by injecting a dopant into a part of the P-well region or N-well region. A gate oxide layer and a poly-silicon layer may be formed over the well region, the drift region, and the STI. A control gate pattern may be formed by patterning the gate oxide layer and the poly-silicon layer. A source region and a drain region may be formed on opposite sides of the control gate pattern. A silicon nitride layer may be deposited over the control gate pattern and etching the silicon nitride layer to form a spacer around a sidewall of the control gate pattern. A plurality of insulating layers may be formed over the control gate pattern, and via-patterns may be electrically connected to the source region and the drain region, respectively. A drain electrode and a source electrode may be electrically connected to the via-patterns, respectively.

Description

[0001] This application claims the benefit of Korean Patent Application No. 10-2006-0085484 filed on Sep. 6, 2006, which application is hereby incorporated by reference. technical field [0002] The present invention relates to a semiconductor device and a manufacturing method thereof, in particular to a flash memory device with a single polycrystalline structure capable of reducing the cross-sectional area and a manufacturing method thereof. Background technique [0003] A flash memory is a programmable ROM (PROM) capable of electrically rewriting data. Flash memory is an erasable PROM (EPROM) whose storage element includes a single transistor and has a small area, but must be erased with ultraviolet light every time, and an electrically erasable PROM (EPROM) that can electrically erase data, but the storage element includes two transistors and has a large area. In addition to the combination of PROM (EEPROM). The flash memory is a device for performing a program input met...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01L21/8247H01L21/336H01L27/115H01L29/78
CPCH01L27/11521H01L29/7881H01L27/11558H01L27/115H10B69/00H10B41/30H10B41/60H01L21/28141
Inventor 崔容建
Owner DONGBU HITEK CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products