Metal membrane lens including nano seam
A metal film and nano-slit technology, which is applied in the field of metal film lenses containing nano-slits, can solve problems such as unfavorable system integration, complex structure, and high accuracy requirements
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[0031] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but the scope of protection of the present invention is not limited to the following examples, but should include all content in the claims.
[0032] The concrete steps of the embodiment of the present invention are as follows:
[0033] (1) Select the working wavelength λ as 810nm, and the polarization mode as TM mode, and determine that the object distance and image distance of the designed metal film lens imaging are both 1um;
[0034] (2) Select silicon dioxide as the base material, and deposit 300nm metallic silver on its surface;
[0035] (3) Allow the incident light to be incident perpendicular to the upper surface of the metal film, and use the formula (1) to calculate the skin depth of the light at the working wavelength to be 25nm;
[0036] d F = λ 2 ...
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